Inficon LDS3000 Modular Leak Detector Manuel d'utilisateur

Type designationProduct descriptionINSTALLATION MANUALCatalog no.from software versionDocument no.560-300MS Module 1.0jiqa54en1-b (1301)LDS3000Mass sp

10 Description4 DescriptionThe mass spectrometer module is part of the leak detection system LDS3000. Themass spectrometer module can be operated as p

Description 112- Turbo molecular pumpTurbo molecular pump with cooling unit3 - Pre-amplifierPre-amplifier of the mass spectrometer module4 - MSB boxIn

12 Description3 - GAUGES, EXTConnection for optional external pressure measurement locations (0 ... 10 V or0 … 20 mA) for INFICON ServiceConnection pl

Description 1312 - STATUSStatus LEDThe Power LED and Status LED indicate the status of the unit.13 - CONTROL UNITConnection for control unit or I/O or

14 Description4.3.2 Electrical data4.3.3 Physical data4.3.4 Ambient conditionsSupply voltage 24 V ± 10% DCPower input max. 10 ANoise level < 60 dB(

Description 154.3.5 Factory settingsParameter Factory settingOperation mode VacuumBus module address 126Pressure capillary surveillance (min.) 0.4 mba

16 DescriptionFan mode Fan always onMachine factor in standby OffMachine factor / Sniff factor 1.0 (for all masses)Mass 4Maximum pressure VAC 18 mbarM

Installation 175 Installation5.1 Rotating the MSB boxIf required, you can push the MSB box into the mass spectrometer module LDS3000on the rear side.►

18 Installation Self-locking nuts M8 Open-end wrench, size 13 Allen wrench, size 6 Holes for installation inside the test systemThe mass spectrome

Installation 195.3 Connecting the mass spectrometer module to the test systemThe operation mode of the vacuum connection and the speed of the turbo mo

2This document applies to the software version stated on the cover page. If you needa different version, please contact our sales staff.Reprint, trans

20 Installation5.4 Connection of the connection block1 Connect PIRANI gauge and backing pump to GROSS/FOREPUMP.2 Connect the test leak to the second a

Operation 216 OperationYou can use the following accessories in combination with the mass spectrometermodule:• CU1000 (control unit)• BM1000 (bus modu

22 Operation6.2.1 Factory layoutAnalog output 1: Leak rate mantissaAnalog output 2: Leak rate exponent6.2.2 Possible layoutsOffThe analog outputs are

Operation 23Via interfaceThe output voltage can be specified via the LD protocol command 221.Leakage rate Ma. Hys.0.7 ... 10 V; linear; in used unitIn

24 Operation6.2.4 Configuration (LDS2010-compatible)LDS2010 setting in menu item 22Analog outputLDS2010 function LDS3000 functionDecade scaleUpper lim

Operation 2591Pressure p1 log. in Pa1 V/decade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbarp1 1 V/dec. irrelevant irrelevant92Pressure p2 log. in Pa1 V/decade, 2

26 Operation17 1Leak rate log. in mbar·l/s0...8V, 2V/decade, 0 V = 1E-10 mbar·l/sLeak rate log. 2 V/dec. 1E-5 mbar·l/s17 2Leak rate log. in mbar·l/s0

Operation 276.3 Assigning the digital inputs of the I/O moduleThe available functions can be assigned in any way necessary to the digital inputsPLC-IN

28 OperationInformation Every function can be inverted.► Assign the digital inputs of the I/O module as needed:SETTINGS > SET UP > INTERFACES &g

Operation 29Information Every function can be inverted.► Assign the digital outputs of the I/O module as needed:SETTINGS > SET UP > INTERFACES &

Content 3Content1 About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51.1 Target groups . . . . . . . . . . . . . . . .

30 Operation6.5 Starting/stopping the measurementStarting Device in STANDBY► Start measurement. Device switched to MEASURE state.Stopping Unit meas

Operation 316.8 Activate/deactivate ZEROZERO can be used to suppress undesired helium backgrounds. If ZERO is enabled,the currently measured leakage r

32 Operation6.10 Calibrating the unit► To ensure measuring accuracy, the unit must be calibrated regularly.Information Recalibration at the start of e

Operation 336.10.1 Internal calibration Internal test leak connected.1 Enter leakage rate of the test leak via digital interface (control unit CU1000

34 Operation6.10.3 Enable/disable Calibration requestIf Calibration request is enabled, the unit will prompt the user to perform a calibration30 minut

Operation 356.11 Select sample gasThe mass spectrometer module is capable of measuring the following gases:• Hydrogen (H2)• Mass 3 (H-D, 3He oder H3)•

36 Operation6.15 Enable/disable correction of the leakage rate in StandbyEnabled = machine/sniff factor is considered in Standby.Disable = machine/sni

Operation 37110 W Clock is not set 16 16Jumper for clock not set, battery drained, clock defective122 WNo answer from bus module99 99Connection to BUS

38 Operation252 EVoltage REF5V shortened,(voltage [V])24 120+15V or REV5V too low, short circuit at pre-amplifier, IF board or MSB defective3xx detect

Operation 39360 WPreamp output too low(preamp voltage [V])31 123<-70 mV at 500 GΩPoor ion source or contaminated mass spectrometer361 WPreamp offse

4 Content6.2.2 Possible layouts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226.2.3 Output voltages in case of error . . . .

40 Operation5xx Pressure and flow errors500 WPressure sensor not connected,(pressure p1 voltage [V])58 144 0.5VPirani P1 not connected, IF board or MS

Operation 41* compatib. LDS1000/LDS2010 or binary protocol611 WMachine factor too high,(machine factor)81 1531.00E+04Machine factor adjustment inaccur

42 Operation6.20.1 Error codes of the status LEDAny errors or warnings occurring in the MSB box will be indicated both as an errorcode by the control

Maintenance 437 MaintenanceThe mass spectrometer module is a leak detector that is intended for industrialapplications. The unit is composed of parts

44 Maintenance7.3 Maintenance scheduleFailure to perform the maintenance work specified in the maintenance schedule willvoid the warranty granted on t

Maintenance 457.4 Maintenance steps7.4.1 Change operating fluid reservoir of turbo molecular pump1 Shut down mass spectrometer module, see Chapter 8,

46 MaintenanceRemoving old operating fluid reservoir Face pin wrench, P/N: 551-200 Two screwdrivers Tweezers O-ring Operating fluid reservoir, P/

Maintenance 47Replacing Porex rods1 Pull out the old Porex rods (8 pcs) using a pair of tweezers.2 Remove any contaminants found on the turbo molecula

48 MaintenanceInserting a new operating fluid reservoirThe new operating fluid reservoir will be positioned correctly when you screw in thecover:1 Do

Taking out of service 498 Taking out of service8.1 Shutting down the leak detector1 Switch off the leak detector on the power supply pack.2 Wait until

About this manual 51 About this manual1.1 Target groupsThis installation manual is intended for the operator and for technically qualifiedpersonnel wi

50 Appendix9 Appendix9.1 EC Declaration of Incorporation

Appendix 519.2 Declaration of ContaminationINFICON GmbHBonner Str. 498,50968 Cologne, GermanyTel: +49 221 3474 2222 Fax: +49 221 3474 2221www.infico

INFICON GmbH, Bonner Strasse 498, D-50968 Cologne, GermanyUNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KIN

6 About this manual1.3.2 Text markingsMarking MeaningRequirement for execution of an actionTool or aid for an action►Instruction1, 2, 3, ... Several

Safety 72 Safety2.1 Intended useThe unit is a modular leak detector for installation in industrial leak detectionsystems. The test gases that can be m

8 Safety2.4 General safety informationThe unit was built according to the state of the art and the recognized safetyregulations. Nevertheless, imprope

Shipment check, transport, storage 93 Shipment check, transport, storage3.1 Checking shipmentScope of delivery► Check shipment to make sure it is comp