Inficon STC-2000A Thin Film Deposition Controller Operatin Manuel d'utilisateur

p STC-2000A DEPOSITION CONTROLLER y TFC-2002 JM USERS MANUAL 518-031 Rev A, January 7, 2004 .current: Sycon STC-2000A Depo

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX e page 10 of 292 ^ I/O Programming Introduction ...

p STC-2000A DEPOSITION CONTROLLER y Pressing the NEXT FILM key brings forth the numeric entry screen that is used to select the next active film. BA

p STC-2000A DEPOSITION CONTROLLER y scale and [re]started using the manual key. The user might also reconfigure the [external] source power supply t

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.9 Software Controlled RunTime Screen Keys There are several software controlled keys that are active

p STC-2000A DEPOSITION CONTROLLER y Related Film Parameters: (XTAL) RATE SAMPLING OFF,TIMED,INTELL. (XTAL) SAMPLE INTERVAL 0:01-99:59 MM:SS (XTA

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.XX  page 104 of 292 

p STC-2000A DEPOSITION CONTROLLER y press fixed MANUAL key for manual power adjustment using pendant STOPINC DEC Figur

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.11 STC-2000A Shutter Delay (Setting Up Shutter Delay Mode) Shutter Delay Operation Shutter delay

p STC-2000A DEPOSITION CONTROLLER y is typically set to equal the slowest time constant in the control loop. The D or Derivative term helps to antic

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.13 Film Phases and Parameter Groups There are several phases during a deposition layer of the STC-

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.14 System Configuration System configuration is a category that generally includes parameters t

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX e page 11 of 292 ^ GLOSSARY [9.XX]...

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.15 Detailed System Configuration Related Parameters _____________________________________________

p STC-2000A DEPOSITION CONTROLLER y Parameter RECORDER FUNCTION Analog output type: Rate, Deviation, Power, Thickness, Remote Units None Sele

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.16 Communications Configuration Related Parameters Communications setup The Communications setup m

p STC-2000A DEPOSITION CONTROLLER y Detailed Communications Configuration Related Parameters __________________________________________________

p STC-2000A DEPOSITION CONTROLLER y ____________________________________________________________________ Parameter RS 232 BAUD RATE RS 232 B

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.17 STC-2000A Crystal Failure Processing The STC-2000A instrument gives the user many options in

p STC-2000A DEPOSITION CONTROLLER y Forcing A Crystal Switch Manual Crystal Switching can be accomplished from the front panel while in the RunTim

p STC-2000A DEPOSITION CONTROLLER y Crystal Stability The STC-2000A will display the crystal stability value detected during the deposition run on

p STC-2000A DEPOSITION CONTROLLER y Averaging with Multiple Active Crystal Sensors and Averaging For Multi Layer Depositions This adds another le

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.18 Process Accounting The process accounting screen displays a summary of the vital parameters o

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX e page 12 of 292 ^ RunTime Screen With Test Mode Enabled ...

p STC-2000A DEPOSITION CONTROLLER y the presence of 2 zeroes indicates that the sensor card is installed and enabled (by menu parameter) and in an O

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.19 OPTions/INFo: product identification, diagnostics, etc. OPTIONS/INFO: From the RunTime sc

p STC-2000A DEPOSITION CONTROLLER y Options/Info, page 5 of 6 Options/Info, page 6 of 6 Displays live frequency measurements from Displays

p STC-2000A DEPOSITION CONTROLLER y one for the I/O rungs (Main Menu: Executive Menu: I/O Setup). See sections 2.5, 2.7, 5.10 and 5.13 for related

p STC-2000A DEPOSITION CONTROLLER y The following screens are examples of what may appear after a PURGE/REBOOT sequence: The l

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.20 Memory Module Programming & Usage The Memory Module (or Memory Card) option allows saving

p STC-2000A DEPOSITION CONTROLLER y Here are typical Options/Info screen messages [note STATUS line]: Not detected means that the STC-2000A could n

p STC-2000A DEPOSITION CONTROLLER y Has ID type 11 indicating 96kbyte module. DATA TRANSFER From the main menu, press the service key t

p STC-2000A DEPOSITION CONTROLLER y PROBLEM INDICATIONS If the memory module LED is not illuminated in either or both of the WP switch positions

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.21 Programming Example Perhaps the best way to become familiar with the STC-2000A operation and

p STC-2000A DEPOSITION CONTROLLER y .included parts: STC-2000A, power cord, spare parts. STC-2000A Spare Parts (included with STC-2000A) ASSEMB

p STC-2000A DEPOSITION CONTROLLER y Programming Process 1 - (Example) Process Programming Example If the STC-2000A is already interfaced to a sy

p STC-2000A DEPOSITION CONTROLLER y 2.) Move the cursor to step 01. 3.) Press the insert (INS) key until the END is on step 07. This action inserts

p STC-2000A DEPOSITION CONTROLLER y Figure- 3.18: Six Layer Test Process. After programming the above process,

p STC-2000A DEPOSITION CONTROLLER y This program for Film 1 will tell the STC-2000A to use a single rise cycle to 15% power over a one minute per

p STC-2000A DEPOSITION CONTROLLER y Note [NOTE: The text ACTIVE will also appear on the second line and designate which Film is active. This same v

p STC-2000A DEPOSITION CONTROLLER y Figure 3.19: Change the Active Process (see Section 2.19) Running The Test Program Starting the

p STC-2000A DEPOSITION CONTROLLER y PWR number is moving around 15%. You will notice the graph on the screen start to plot also. This can give you

p STC-2000A DEPOSITION CONTROLLER y Product programming summary SECTION 3.22 Summary In all of the following cases, use BAKs and/or BYEs for a

p STC-2000A DEPOSITION CONTROLLER y Communications setup includes: COM/IO lock code KEYBOARD BEEP RS232 Baud rate RS232 Protocol To view / program

p STC-2000A DEPOSITION CONTROLLER y To view / program film parameters... Screen Key{s] to press RunTime fixed MENU MAIN MENU REVIEW FILM REVIEW

p STC-2000A DEPOSITION CONTROLLER y Cables 10' OSC TO CONTROL UNIT CABLE ...500-026 30' OSC TO CONTROL

p STC-2000A DEPOSITION CONTROLLER y To view / program I/O Setup... Screen Key[s] to press RunTime fixed MENU MAIN MENU EXECUTIVE MENU EXECUTIVE M

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.XX  page 141 of 292  To select/use Sample and Hold (see System Configuration parameter)... Scre

p STC-2000A DEPOSITION CONTROLLER y Electrical Connections And Descriptions SECTION 4.0 Sensor Head Installation Following is a diagram of a

p STC-2000A DEPOSITION CONTROLLER y Install the sensor so that the crystal opening is in a direct line with the evaporation source and well within

p STC-2000A DEPOSITION CONTROLLER y Water Line Caution: Caution CAUTION Ensure that the water lines are clear of obstructions before operati

p STC-2000A DEPOSITION CONTROLLER y Electrical Connections and Descriptions All electrical connections to the STC-2000A, with the exception of the

p STC-2000A DEPOSITION CONTROLLER y susceptible to transient noise and it is highly recommended that it be installed. Refer to figure below for an

p STC-2000A DEPOSITION CONTROLLER y Crystal Sensor Inputs These connectors are the remote sensor oscillator’s interface to the STC-2000A. These c

p STC-2000A DEPOSITION CONTROLLER y Control Signal 1 Pin No. +Output 9 -Output 4 Analog Ground (common) 5 Shield SHLD Connector Type – 9 PIN D-SUB

p STC-2000A DEPOSITION CONTROLLER y CHART RECORDING OF 3500Å FILMANALOG OUTPUTFOR THICKNESS3500Å3000Å2000Å1000ÅVOLTS12345678910 Figure- 4.4: Examp

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.7 PRODUCT SPECIFICATIONS STC-2000A Thin-Film Thickness and Rate Controller Specifications High R

p STC-2000A DEPOSITION CONTROLLER y I/O Interface Input Card Options: An opto-isolated input card can be configured in a number of ways. Inputs

p STC-2000A DEPOSITION CONTROLLER y operation requires the user to supply a separate 5VDC bias, which is not grounded to the STC-2000A unit. Do not

p STC-2000A DEPOSITION CONTROLLER y JP2JP15VDC ext5VDC1A1B1C8A8B8C(Internal Vcc)(row C is closest to PC board)+ Inputs to Opto Circuitsare on Row

p STC-2000A DEPOSITION CONTROLLER y The RELAY OUTPUTS connector provides the user an interface to 8 Form C (SPDT) relays. The contact rating of th

p STC-2000A DEPOSITION CONTROLLER y Remote Inputs for Factory Installed I/O Program The standard STC-2000A is equipped with eight remote input funct

p STC-2000A DEPOSITION CONTROLLER y SECTION 4.XX  page 155 of 292  To: IBM - PC,XTTxDRxDCTS235DSRGNDDTR6720To: STC-2000A9 PIN FEMALERxDTxDGNDSH

p STC-2000A DEPOSITION CONTROLLER y SECTION 5 I/O PROGRAMMING I/O Programming Introduction The ability of the user to configure the structure

p STC-2000A DEPOSITION CONTROLLER y can be used to store intermediate results. In this case, the soft node forms the output portion of the rung. T

p STC-2000A DEPOSITION CONTROLLER y Manner in which relays and events are set or triggered.

p STC-2000A DEPOSITION CONTROLLER y Every time the Model 880 comes across an output function or operator, the top

p STC-2000A DEPOSITION CONTROLLER y .programmable parameter list (1.4). SECTION 1.8 Programmable Parameter Lists ________________________________

p STC-2000A DEPOSITION CONTROLLER y Boolean Operations SECTION 5.2 Boolean Definition A basic understanding of Boolean operations is needed bef

p STC-2000A DEPOSITION CONTROLLER y Truth Table Notation When using Boolean operators, it is common to use a truth table, (Refer to Table 5.3).

p STC-2000A DEPOSITION CONTROLLER y ID Number Valid Functions - Type Class Description 0 To 7 I - B I/O Remote Inputs 1 Through 8 (slo

p STC-2000A DEPOSITION CONTROLLER y 85 I - M Istate Xtal Failed Map- Failed Sensors 86 I - V Istate Sample / Hold Status

p STC-2000A DEPOSITION CONTROLLER y 115 I - V Istate Sensor Slot A Status: PCB that was initially OK, now fails [6] 116 I -

p STC-2000A DEPOSITION CONTROLLER y 217 IT Event Final Thickness Trigger (from measurement or external) 218 IT Event Rate measurement system (

p STC-2000A DEPOSITION CONTROLLER y SECTION 5.4 Steady State vs. Edges In order to fully understand how an I/O program works, we need to look a

p STC-2000A DEPOSITION CONTROLLER y Output Functions There are several ways to evaluate the result of a rung in the STC-2000A. A rung must hav

p STC-2000A DEPOSITION CONTROLLER y Another usage is to re-program some of your relays quickly. Just use the soft nodes as intermediate outputs o

p STC-2000A DEPOSITION CONTROLLER y evaluating a rung. These stack rules are checked when the editing of a rung is completed. If the stack operati

p STC-2000A DEPOSITION CONTROLLER y POCKET SELECT 0 – 63 Pockets ETCHING MODE OFF/ON Process Step elements: [Menu end point: Review Pr

p STC-2000A DEPOSITION CONTROLLER y Editing an I/O Program In order to get to the I/O screens, you need to navigate through the following seque

p STC-2000A DEPOSITION CONTROLLER y A fictitious representative section of the real I/O Programming menu tree on the following page is presented he

p STC-2000A DEPOSITION CONTROLLER y Programming Tree Figure- 5.5: I/O Programming Tree. I/O S

p STC-2000A DEPOSITION CONTROLLER y General Descriptions of I/O MENUs GOTO: Press GOTO to move to a specified line (rung) in the I/O program setu

p STC-2000A DEPOSITION CONTROLLER y MEM: This allows you to save and exchange (swap) the I/O program that is in memory. A sub-menu selects among 3

p STC-2000A DEPOSITION CONTROLLER y I/O SETUP Edit Menu SECTION 5.12 Pressing the EDT (edit) key produces the I/O Setup Edit menu as seen in figur

p STC-2000A DEPOSITION CONTROLLER y Rung (Line) # : -- Token string of Rung Note If an incorrect token string is entered on a rung, an error m

p STC-2000A DEPOSITION CONTROLLER y press ENT here to accept #2 pressing ENT here accepts the rung though it's not completeThe "rung&

p STC-2000A DEPOSITION CONTROLLER y The 5 key type menus are shown immediately below. EDT/CHG or simply CHG (change) MENUs 1st of

p STC-2000A DEPOSITION CONTROLLER y AND: This is the AND operator. It will take the top 2 variables from the stack, perform an AND operation, and

p STC-2000A DEPOSITION CONTROLLER y Source Sensor Max Power Value 0.0% - 100.0% Source Sensor Analog Output Chnl 1 – 2 Channel Selection Master To

p STC-2000A DEPOSITION CONTROLLER y LES: A comparison function as in I5 < I6 (I5 I6 <). This can be a scalar entity but the stack result will

p STC-2000A DEPOSITION CONTROLLER y Example 1: Entering a very simple I/O program. The following screen sequence illustrates the programming of th

p STC-2000A DEPOSITION CONTROLLER y press 1 seven times. Press ENTer key to accept. Press ENTer to accept entire line (rung). * Althou

p STC-2000A DEPOSITION CONTROLLER y Example 2: Editing of a rung Following is the result of pressing CHG with rung # 004 in the edit/change posit

p STC-2000A DEPOSITION CONTROLLER y Using the BAKSP key, the newly entered #1 can be eliminated: #1 has been removed. Next, move the cursor back

p STC-2000A DEPOSITION CONTROLLER y key), the ID number will remain unchanged. This number (with hex digits such as A4F656) is a check sum of the en

p STC-2000A DEPOSITION CONTROLLER y Using The Goto Function Step 3 Get to the rung that is to be changed. There are two ways to do this. The firs

p STC-2000A DEPOSITION CONTROLLER y We will do the same thing again, press the IN key again and enter an I0. The display will now look like the 1st

p STC-2000A DEPOSITION CONTROLLER y Input 1 Start Process Film – In sequencing mode, functionally identical to the fixed Front Panel START key fol

p STC-2000A DEPOSITION CONTROLLER y different bit weights. This combined map value encodes the state of each of the possible eight source's act

p STC-2000A DEPOSITION CONTROLLER y Film Parameter Dependency List: Material Density Not Applicable Material Z-Factor N.A. Setpoint Thickness L

p STC-2000A DEPOSITION CONTROLLER y operating in the NON-sequencing mode, of starting the currently selected ActiveFilm. In this way a stopped unit

p STC-2000A DEPOSITION CONTROLLER y (O64). This rung serves no useful purpose other than to demonstrate the use of one of the four soft-switch input

p STC-2000A DEPOSITION CONTROLLER y Counters Counter A Is represented by the ID 400. Using the 400 identification, the counter when used as an ou

p STC-2000A DEPOSITION CONTROLLER y Entering The Program For a little practice with counters or using the I/O, this program can be entered at the

p STC-2000A DEPOSITION CONTROLLER y I98 #2 / #1 & O301, Bit D1 of RTRSYNC shifted/masked to LSB SN301 I301 I300 & T235, When PocketGo

p STC-2000A DEPOSITION CONTROLLER y instrumentsSTOPINCDECMANUAL POWER Figure- 5.13: Hand Controller (also called a Pendant). One common usage

p STC-2000A DEPOSITION CONTROLLER y Nest Too deep The I/O rung contains an extra input or is missing a logical operator or output term. Stack under

p STC-2000A DEPOSITION CONTROLLER y SECTION 5.XX  page 197 of 292  <

p STC-2000A DEPOSITION CONTROLLER y SECTION 6.0 Computer Interfacing The STC-2000A can be connected to a computer in a variety of ways. An RS

p STC-2000A DEPOSITION CONTROLLER y After the proper cable is made or purchased, make sure the baud rate of the computer and STC-2000A are the sam

p STC-2000A DEPOSITION CONTROLLER y © Copyright Sycon Instruments, Inc. & Custom 2003 AMPHENOL® is a registered trademark of Allied Corporat

p STC-2000A DEPOSITION CONTROLLER y [NOTE1: press to invoke number entry submenu, sequence of 1 or 2 digits is entered or discarded] Note2: [t

p STC-2000A DEPOSITION CONTROLLER y Table 6.1 Basic Driver Routine 4 Rem Sycon STC-2000A Communications Demo Routine. 6/12/1989 S. Bende

p STC-2000A DEPOSITION CONTROLLER y SECTION 6.2 ASCII Protocol While the ASCII protocol is the simplest to use it doesn't provide for any

p STC-2000A DEPOSITION CONTROLLER y RS-232 Baud Rate The RS-232 Baud Rate parameter sets the baud rate for the RS-232 interface. It can be progra

p STC-2000A DEPOSITION CONTROLLER y power failures or resets (such as when the unit is first powered up). Once this condition is recognized and hand

p STC-2000A DEPOSITION CONTROLLER y INITIALIZATION COMMANDSInitialization Commands Group 1-- Commands @ & ? Initialize communications

p STC-2000A DEPOSITION CONTROLLER y @10 = response from SCUP UIFC vrsn string info. @11 = UIFC Code signature. @12 = UIFC Bootloader

p STC-2000A DEPOSITION CONTROLLER y ______________________________________________________________________ Initialization Commands Example Command

p STC-2000A DEPOSITION CONTROLLER y [RZCD_ILDV] (H or I) if film #, parameter #, or new value is of improper value.

p STC-2000A DEPOSITION CONTROLLER y Used to stop the deposition process in non-sequencing mode. Non-sequencing mode does not use a process program b

p STC-2000A DEPOSITION CONTROLLER y This parameter sets the duration of the power ramp from the soak 1 power value or the idle power value to the va

p STC-2000A DEPOSITION CONTROLLER y (I/O parameters) Main Menu/ Executive Menu/ Communications Setup: Com/IO Lock Code [non-zero value enables

p STC-2000A DEPOSITION CONTROLLER y Parameter 20 Rate Ramp Time access: RRTM rate ramp time Value Range 0:00 - 99:59 Units Min:Sec This p

p STC-2000A DEPOSITION CONTROLLER y Parameter 27 Max. Power Dwell access: MPTM max power time interval Value Range 0:0 - 99:59 Units Min:Se

p STC-2000A DEPOSITION CONTROLLER y access: XSTI crystal sample time interval Value Range 0:01 - 99:59 Units Min:Sec For either mode of oper

p STC-2000A DEPOSITION CONTROLLER y access: CLQU control loop quality limit Value Range 0 - 9 Units None This parameter is used to set a thr

p STC-2000A DEPOSITION CONTROLLER y Units map# This parameter selects the map that is to be associated with film that invokes it. _______________

p STC-2000A DEPOSITION CONTROLLER y SECTION 6.8 Read, Write System Parameters Group 3-- Commands C & D (C) Read system parameters. These comma

p STC-2000A DEPOSITION CONTROLLER y Read or set the process number that is currently active. The set command is inhibited if a process is running.

p STC-2000A DEPOSITION CONTROLLER y There are 2 analog outputs on the STC-2000A. One analog output per STC-2000A can be used as a recorder output.

p STC-2000A DEPOSITION CONTROLLER y ______________________________________________________________________ Parameter 18 NA access value: OBSO

p STC-2000A DEPOSITION CONTROLLER y Units None ______________________________________________________________________ Parameter 31 I/O Slot 4 Ty

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX  page 22 of 292  Electrical Connections ...

p STC-2000A DEPOSITION CONTROLLER y [RZCD_AOK][data_value] if proper data # (1..13) id was sent. Exact format of [data_value] depends on the particu

p STC-2000A DEPOSITION CONTROLLER y This parameter returns the current deviation from the programmed rate setpoint. A negative number indicates the

p STC-2000A DEPOSITION CONTROLLER y Value Range 5000000.0…6000000.0, 0.0 if bad crystal Units Hz This is the measured frequency of the active sen

p STC-2000A DEPOSITION CONTROLLER y source 2 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically insta

p STC-2000A DEPOSITION CONTROLLER y Parameter 38 rate from sensor 1 access index: RATE1 Value Range 0 To 9999 [integer] Units Deci-angstrom

p STC-2000A DEPOSITION CONTROLLER y Parameter 50 N.A. ______________________________________________________________________ Parameter 51 N.A. __

p STC-2000A DEPOSITION CONTROLLER y Read, Set Status Information Read, Set Status Information Group 5-- Commands F & G (F) Read St

p STC-2000A DEPOSITION CONTROLLER y Parameter 1 Soak Hold Status Value Range 0,1 Units False/True This parameter indicates if a soak hold state is

p STC-2000A DEPOSITION CONTROLLER y This parameter is used to indicate that the STC-2000A is in a stopped state. The following returned values are:

p STC-2000A DEPOSITION CONTROLLER y access: SRCSHUT bitmap true(1) when source shutter open, false(0) if closed. One per active source ident (1..8)

p STC-2000A DEPOSITION CONTROLLER y SIMPLE QUICK GENERALIZED OVERVIEW SECTION 2.0 The STC-2000A addresses the needs of thin film deposition

p STC-2000A DEPOSITION CONTROLLER y access: XTLSHUT xtal shutter state, true(1) when using a xtal, false(0) when ignoring data from crystal, shutte

p STC-2000A DEPOSITION CONTROLLER y 4 Process Accounting Error 8 Process Sequence The values are added together to form a composite error number

p STC-2000A DEPOSITION CONTROLLER y Parameter 19 Process Fail Value Range 0,1,2 Units None This parameter reports if a process has been terminated

p STC-2000A DEPOSITION CONTROLLER y 255 ALL sources overiden to zero power. ____________________________________________________

p STC-2000A DEPOSITION CONTROLLER y N.A. ______________________________________________________________________ Parameter 34 N.A. ______________

p STC-2000A DEPOSITION CONTROLLER y access: SA1_HEADSTATE Source Board-A chl1 head status of HSTAT_class _________________________________________

p STC-2000A DEPOSITION CONTROLLER y Command F9 Response A17 Description Query The Status Parameter 9, Phase Status. Process Sequence is At Ready P

p STC-2000A DEPOSITION CONTROLLER y Deposition is at Desired Rate. If this parameter is TRUE the measured rate is equal to the desired rate, else (0

p STC-2000A DEPOSITION CONTROLLER y capable option unit. 5 START2 Same as START1 except for Film 2. 6 START3 Same as START1 except for Film

p STC-2000A DEPOSITION CONTROLLER y Usefull for establishing timebase in I/O or host interfaces. 42 BOJDPOS Begin of deposit cycle, film being p

p STC-2000A DEPOSITION CONTROLLER y SECTION 2.1 how is it used ? First, a few terms and their definitions are needed. The material to be deposi

p STC-2000A DEPOSITION CONTROLLER y 83 RSYNC_PG3 Pocket good, gun3. 84 RSYNC_PG4 Pocket good, gun4. 85 RSYNC_PG5 Pocket good, gun5. 86 RSYNC_P

p STC-2000A DEPOSITION CONTROLLER y 111 FAILSCL_CHL6 N.A. 112 FAILSCL_CHL7 N.A. 113 FAILSCL_CHL8 N.A. 114 ATRATE_MEZ At rate during measurement

p STC-2000A DEPOSITION CONTROLLER y Command I 5 Response A Description Start process unconditionally, using film #2. Response indicates command u

p STC-2000A DEPOSITION CONTROLLER y of value which is then being stored into these node areas during program evaluation are what the query (exam) re

p STC-2000A DEPOSITION CONTROLLER y Kill Command Command: K Mnemonic: EXCT_kill (KILL, causes equivalent to reset of CPU) Parameters

p STC-2000A DEPOSITION CONTROLLER y The set of L commands are used to read the process accounting information from the STC-2000A to the host compu

p STC-2000A DEPOSITION CONTROLLER y 19 QUALDEP Failed quality while in deposit Table 6.13: Process Accounting Id List. ______________________

p STC-2000A DEPOSITION CONTROLLER y the sequence number to indicate a continuation is needed, with the final portion (or only portion if small enoug

p STC-2000A DEPOSITION CONTROLLER y [RZCD_AOK] upon success. [RZCD_ILDV] if improper value for parameter arguments. [RZCD_ILSN] if too many ar

p STC-2000A DEPOSITION CONTROLLER y Description Request rung # 999 data (rungs will not go that high since data storage allows for a maximum of 400

p STC-2000A DEPOSITION CONTROLLER y Returning to STC-2000A specifics, some additional STC-2000A terminology definitions must now be given. Beyond s

p STC-2000A DEPOSITION CONTROLLER y R - Insert An Empty Rung S - Store The I/O Program Into The Alternate Memory Editing The I/O Program (P, Q, R,

p STC-2000A DEPOSITION CONTROLLER y 0 IOERR_GOOD No error, I/O program has acceptible syntax. 1 IOERR_UNREC Unrecognized format for tokens. 2

p STC-2000A DEPOSITION CONTROLLER y Description Delete rung # 3 from the program, just as if the user used the I/O menu screen to do so. Rungs aft

p STC-2000A DEPOSITION CONTROLLER y Set Analog Output (T) Group 11 -- Command T (T) This command allows the analog output which normally reports e

p STC-2000A DEPOSITION CONTROLLER y (U) - Reads Number Of Steps (00 ...99) In A Given Process (1...9) (V) - Reads Process Step Memory Storage Stil

p STC-2000A DEPOSITION CONTROLLER y Description Query of free (unused) steps available indicates 250 are unused. This means none have been used fo

p STC-2000A DEPOSITION CONTROLLER y The ‘d’ commands the STC-2000A to set a process step’s thickness limit to a new value. _________________________

p STC-2000A DEPOSITION CONTROLLER y [RZCD_AOK][mode_value] if proper process and step #s were sent. [RZCD_ILCD] if unit is non-sequencing instru

p STC-2000A DEPOSITION CONTROLLER y [RZCD_AOK] if proper process, step and film numbers were sent. [RZCD_ILCD] if unit is non-sequencing instrum

p STC-2000A DEPOSITION CONTROLLER y 89, the inserted step is placed at the previous last step plus one. For example, if prior to the X1, 89=1 comma

p STC-2000A DEPOSITION CONTROLLER y NON-SEQ MODE In terms of STC-2000A usage, the simplest configurations would be either in sequen

p STC-2000A DEPOSITION CONTROLLER y ______________________________________________________________________ Purge all I.O Programs Pur

p STC-2000A DEPOSITION CONTROLLER y Command i Response A0 Description Memory Module not installed. ______________________________________________

p STC-2000A DEPOSITION CONTROLLER y Parameters: either ID=VAL or ID ID is a firmware dependent value which can range from 1 to QUAN_COPTCS, current

p STC-2000A DEPOSITION CONTROLLER y state. The five value choices of 0,1, 2, 3 and 4 correspond to the following meanings: Value Access Descript

p STC-2000A DEPOSITION CONTROLLER y 13 MINSC Minimum Starting Contributors, 1 or 2. 14 MINRB Minimum Remaining Backups for

p STC-2000A DEPOSITION CONTROLLER y SECTION 6.XX  page 265 of 292  Returns: Error codes typical to format or range failure if format is incorre

p STC-2000A DEPOSITION CONTROLLER y SECTION 7.0 Theory and Calibration Measurement Theory The STC-2000A uses the resonant frequency of an exp

p STC-2000A DEPOSITION CONTROLLER y Thickness Reading Calibration SECTION 7.1 Thickness Instrument calibration is affected by three different par

p STC-2000A DEPOSITION CONTROLLER y Tooling Determination Place a substrate in the normal holder location and deposit a film of approximately 500

p STC-2000A DEPOSITION CONTROLLER y Material Reference Table SECTION 7.2 Common Material Bulk Density And Z-Factor Values Material Symbol Bulk De

p STC-2000A DEPOSITION CONTROLLER y Density Z Factor Setpoint Limits Rate Ramp Power/Time Soak Power/Time Deposit Rate Values PID

p STC-2000A DEPOSITION CONTROLLER y Material Symbol Bulk Density Z Factor gm/cc Indium Intimonide InSb 5.76 0.769 Indium Oxide In2O3 7.1

p STC-2000A DEPOSITION CONTROLLER y SECTION 7.XX  page 271 of 292  Material Symbol Bulk Density Z Factor gm/cc Thallium Tl 11.85 1.550 T

p STC-2000A DEPOSITION CONTROLLER y Section 8.0 Maintenance/Problem Solutions Maintenance of STC-2000A Deposition Controller Hazardous Voltages

p STC-2000A DEPOSITION CONTROLLER y SECTION 8.XX  page 273 of 292 

p STC-2000A DEPOSITION CONTROLLER y SYMPTOM CAUSE REMEDY 6. Poor thickness reproducibility a. Poor source emission pattern Move sensor. Check so

p STC-2000A DEPOSITION CONTROLLER y 2000A should read about 50% while this button is depressed. If this is observed while this button is depressed t

p STC-2000A DEPOSITION CONTROLLER y SECTION 8.XX  page 276 of 292  SECTION 8.3 FAQs Question: Why, when exiting a deposit mode (system shu

p STC-2000A DEPOSITION CONTROLLER y Section 9.0 Glossary If a term cannot be found here in the glossary, check the programmable parameter list

p STC-2000A DEPOSITION CONTROLLER y SECTION 9.XX  page 278 of 292  Employed to simulate (w/ simulated rate information) a crystal sensor input

p STC-2000A DEPOSITION CONTROLLER y Section 10.0 QUICK INDEX (continued from section 1.2) All menu navigation begins with the Runtime screen d

p STC-2000A DEPOSITION CONTROLLER y solenoids, etc. The card IDs (software addresses) of the PCBs (sensor, input, output cards) are not unique with

p STC-2000A DEPOSITION CONTROLLER y 1. d2) description: The host port communications include an alternate means of programming the unit other than

p STC-2000A DEPOSITION CONTROLLER y 1. h) description: Configuration of FILM, PROCESS, and MAP parameters can be accomplished by menu keys or by ho

p STC-2000A DEPOSITION CONTROLLER y see index keyword programming summary: Fixed STATUS key  Fixed STATUS key  Fixed STATUS key  Fixed STATUS key

p STC-2000A DEPOSITION CONTROLLER y 2. c) description: Power supply control describes the analog output from the 9 pin D-sub female labeled source i

p STC-2000A DEPOSITION CONTROLLER y purpose: INPUT card control background/conceptual info: page 36, section 2.2. detailed info: pages 147-149, sect

p STC-2000A DEPOSITION CONTROLLER y background/conceptual info: pages detailed info: pages see index keyword programming summary: Runtime Screen  L

p STC-2000A DEPOSITION CONTROLLER y SECTION 10.XX  page 286 of 292  can be up to 9 PROCESS checksums. Since there can be up to 2 I/O programs (

p STC-2000A DEPOSITION CONTROLLER y INDEX 1 1st STATUS screen...56 2 2nd STATUS screen...

p STC-2000A DEPOSITION CONTROLLER y options overview ...37 overview...25, 2

p STC-2000A DEPOSITION CONTROLLER y SECTION 11.XX  page 289 of 292  S SOAK copy FILM parameter list...287 host communic

p STC-2000A DEPOSITION CONTROLLER y SECTION 2.XX  page 29 of 292 

p STC-2000A DEPOSITION CONTROLLER y [copy this page to record film parameters] Film Parameters for Film #________ in Process #________:

p STC-2000A DEPOSITION CONTROLLER ydate___-___-___ [copy this page to record map parameters] Source Sensor Map Parameters for Map #_____

p STC-2000A DEPOSITION CONTROLLER ySECTION 12.XX  page 292 of 292  [copy this page to record configuration parameters] System Configura

p STC-2000A DEPOSITION CONTROLLER y SECTION 0.XX  page 3 of 292  Warranty. Sycon Instruments, Inc. (Sycon) warrants that all electronic inst

p STC-2000A DEPOSITION CONTROLLER y Chamber Gate Valve When t

p STC-2000A DEPOSITION CONTROLLER y As the STC-2000A measures the rate of material deposition (in auto deposit mode), it compares this measured val

p STC-2000A DEPOSITION CONTROLLER y Averaging: In addition to the typical configuration of 1 crystal sensor, 1 oscillator, 1 control voltage outpu

p STC-2000A DEPOSITION CONTROLLER y Following is a diagram of a typical evaporator installation. This diagram is repeated and described further in

p STC-2000A DEPOSITION CONTROLLER y Sensor head hardware generalizations (see Section 4 for actual installation details): A vacuum chamber usually h

p STC-2000A DEPOSITION CONTROLLER y controlled by an STC-2000A output card relay connected to a pneumatic value solenoid) is moved remotely to cover

p STC-2000A DEPOSITION CONTROLLER y crystal connection are on the other side of the thick metal disc (places the 3 terminations outside the chamber)

p STC-2000A DEPOSITION CONTROLLER y RS232 Communications Connection: Located in the approximate center of the back panel and labeled with the text R

p STC-2000A DEPOSITION CONTROLLER y Installation/Removal of Sensor Card, Input Cards, Output Cards: Although other combinations are possible, the

p STC-2000A DEPOSITION CONTROLLER y IEC switch/connector A14 AC power supply header B11 ABCDEFGHI JKLM 10 1

p STC-2000A DEPOSITION CONTROLLER y .specifications/included materials (no intro here) unpacking. Unpacking The STC-2000A comes with a power

p STC-2000A DEPOSITION CONTROLLER y LCD contrast/bias: The optimal viewing is designed for perpendicular to about 45 up and about 45 from perpendi

p STC-2000A DEPOSITION CONTROLLER y The specific functional runtime mode must be chosen: sequencing or non-sequencing. Either of these modes can be

p STC-2000A DEPOSITION CONTROLLER y When the STC-2000A sensor card control voltage output is connected to the evaporant power supply, Review Source

p STC-2000A DEPOSITION CONTROLLER y switch is not accessible. Also, use to generate ACCEPT key if not present (e.g. to end the Test mode when in th

p STC-2000A DEPOSITION CONTROLLER y Initial Programming Setups (menu parameters) system configuration programming (factory/ default settings, stand

p STC-2000A DEPOSITION CONTROLLER y Review SS Map values after purge: Source Sensor Full Power Volts 10 volts Source Sensor Max Power Value

p STC-2000A DEPOSITION CONTROLLER y programs, etc.) that will be included in these configurations. Valuable process programming could be lost. The

p STC-2000A DEPOSITION CONTROLLER y Example illustrating softnodes: (where x and y are used like softnodes in the following 3 generalizations) 2

p STC-2000A DEPOSITION CONTROLLER y I90 I91 + I97 ¦ (this ORs inputs 90 and 91 together and ORs the result with I97 [this has the same result

p STC-2000A DEPOSITION CONTROLLER y Starting with the above I/O program, the TRIP function is replaced with the OUTPUT function, and the Boolean NO

p STC-2000A DEPOSITION CONTROLLER y .[please read and understand this manual before proceeding w/ equipment useage]. SECTION 1.2 MANUAL DESCRIP

p STC-2000A DEPOSITION CONTROLLER y The following I/O program activates relay 2 (if relay card is installed in slot 2) when leftmost user programm

p STC-2000A DEPOSITION CONTROLLER y 004: I401 #2 = O65  inputs value of counter location, outputs logical evaluation of numeric count (=2?) t

p STC-2000A DEPOSITION CONTROLLER y SECTION 2.XX  page 52 of 292  2000A. Once this is known, the system user need only run (or setup) their pr

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.0 Menu Programming and Operation Details Overview To reiterate, the STC-2000A is an extremely fle

p STC-2000A DEPOSITION CONTROLLER y STC-2000A Front Panel There are several areas of interest on the Front Panel. These are illustrated in Fig. 3.1

p STC-2000A DEPOSITION CONTROLLER y Typical Runtime screen. The fixed STATUS key returns the RunTime Screen from any menu screen. When the RunTim

p STC-2000A DEPOSITION CONTROLLER y The following 3 LCD screen depictions show the second, third and fourth parts of the above 4 part sequence. The

p STC-2000A DEPOSITION CONTROLLER y If manual mode is entered while in the rise, soak or deposit phases of a deposition, the following arrow key a

p STC-2000A DEPOSITION CONTROLLER y Starting with 3 crystal sensors mounted in a chamber, each having external electrical connections and oscillator

p STC-2000A DEPOSITION CONTROLLER y Check crystal and reinstate if good (re-verify). SECTION 3.XX  page 59 of 292 

p STC-2000A DEPOSITION CONTROLLER y Quick Index If you are already familiar with and know how to use this product, proceed in this section. What

p STC-2000A DEPOSITION CONTROLLER y The general function of the selector/result/select keys is illustrated below. (2nd STATUS screen has only 1 se

p STC-2000A DEPOSITION CONTROLLER y Flow chart depicting the steps of a START process. VERIFY XTAL WAIT CHECK BUSY Proc E

p STC-2000A DEPOSITION CONTROLLER y Fixed Key: Zero Key - Active during runtime screen only. ZERO - This fixed key zeros the thickness number u

p STC-2000A DEPOSITION CONTROLLER y STC-2000A MENU TREE (process sequencing) (non-SEQ differences only)

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.2 RunTime Screen SEE SECTION 2.21 for proper initialization sequence. When the instrument powers

p STC-2000A DEPOSITION CONTROLLER y Area # 4: Miscellaneous 4. Miscellaneous Area. This has several pieces of data in it. These are: FILM - Show

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.3 Main Menu Description From the RunTime screen, you navigate into the main menu parts of the STC-

p STC-2000A DEPOSITION CONTROLLER y Choice: Next Process NEXT ACTIVE PROCESS - This key choice allows the user to change the active process. There

p STC-2000A DEPOSITION CONTROLLER y Figure- 3.7: Executive Menu. fixed STATUS Key Fixed STATUS key removes Main Menu (or any other menu scr

p STC-2000A DEPOSITION CONTROLLER y SECTION 3.4 Films and Processes STC – 2000A Film Process Data StorageFILM # 1 PARAMETERSFILM # 2 PARAMETERSFIL

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX e page 7 of 292 ^ SECTION 1.3 TABLE OF CONTENTS TITLE PAGE...

p STC-2000A DEPOSITION CONTROLLER y The GO2 FLM key thus provides lateral navigation from film to film on that menu level. To reiterate, Selection o

p STC-2000A DEPOSITION CONTROLLER y Pressing the BAK key on the above menus cancels the current menu (or keypad) and moves back to the previous menu

p STC-2000A DEPOSITION CONTROLLER y These 3 parameters are dependent on the RATE RAMP MODE parameter. System Related Parameters The number o

p STC-2000A DEPOSITION CONTROLLER y Note X12345 CHECKSUM NOTE: observe the changing checksum of the parameter list as new parameter values are ENT

p STC-2000A DEPOSITION CONTROLLER y The following reiterates information providing a starting place for parameter values when the STC-2000A is recei

p STC-2000A DEPOSITION CONTROLLER y NON-SEQUENCING MODE: SELECTING THE ACTIVE FILM NON-SEQUENCING MODE Runtime screen. NON-SEQUENCING MODE Ma

p STC-2000A DEPOSITION CONTROLLER y Detailed Film Parameter Descriptions ____________________________________________________________________

p STC-2000A DEPOSITION CONTROLLER y This parameter sets the deposition source power value to be used as the first level of soak power in the pre-d

p STC-2000A DEPOSITION CONTROLLER y Parameter PWR RAMP 3 TIME (IDLE RAMP TIME) Elapsed Time; Range is 0:00 - 99:59 Units Min:Sec Idle Ramp Ti

p STC-2000A DEPOSITION CONTROLLER y Parameter CTL LOOP -D- Control Loop Time Constant; 0.0 - 99.9 Units Seconds Control Loop Differential Ter

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX e page 8 of 292 ^ Menu Parameter Dependencies...

p STC-2000A DEPOSITION CONTROLLER y Shutter Delay Timeout This parameter sets a time limit for the delayed shutter operation to be completed. The

p STC-2000A DEPOSITION CONTROLLER y This parameter assumes there is a shuttered head connected and that Rate Sampling can be used if the film para

p STC-2000A DEPOSITION CONTROLLER y Control Loop Quality Limit This parameter is used to set a threshold on acceptable control loop quality. When

p STC-2000A DEPOSITION CONTROLLER y This parameter is used to associate a specific sensor map to a specific film. When a film becomes active, it w

p STC-2000A DEPOSITION CONTROLLER y Detailed Map Parameter Descriptions ____________________________________________________________________ Pa

p STC-2000A DEPOSITION CONTROLLER y This parameter indicates the minimum number of crystals in the starting group when a process is begun. To reit

p STC-2000A DEPOSITION CONTROLLER y This parameter provides the time value when the map parameter Indexer Synchronization Mode is set to DELAY. Th

p STC-2000A DEPOSITION CONTROLLER y There are programmable Film and Map parameters that are only viable for particular hardware configurations. U

p STC-2000A DEPOSITION CONTROLLER y Review or Edit Processes Figure- 3.12: Main Process Review/Edit Screen. SECTION 3.6 Editing Processes

p STC-2000A DEPOSITION CONTROLLER y Process Start Mode Edit Key Descriptions Mode Choice: End The End mode would terminate the process. It is al

p STC-2000A DEPOSITION CONTROLLER y SECTION 1.XX e page 9 of 292 ^ System Configuration ...

p STC-2000A DEPOSITION CONTROLLER y Mode Choice: DELETE DELETE removes a step from the process program list (key legend is DEL) indicated by the

p STC-2000A DEPOSITION CONTROLLER y Review / Edit Process Specifics. The following shows the review processes screen. The top line contains the menu

p STC-2000A DEPOSITION CONTROLLER y previously unseen, numbers are now occupying the last three of the four displayed lines. The cursor is always m

p STC-2000A DEPOSITION CONTROLLER y Press the UP  key one more time for the following. GO2 STP: pressing the GO2 STP (GOTO STEP) key takes you

p STC-2000A DEPOSITION CONTROLLER y When the destination is greater than 2, the line list will appear with the destination as the third line of th

p STC-2000A DEPOSITION CONTROLLER y Pressing the MOD (mode) key brings forth the mode select menu as follows. SKIP is the default mode value used wh

p STC-2000A DEPOSITION CONTROLLER y Press BAK (back) to abandon FILM# value edit. Press ENT (enter) to accept entered film number value as seen ne

p STC-2000A DEPOSITION CONTROLLER y By using the arrow up/down keys, the order of entry could be to change the modes of lines 5, 6 and 7, then cha

p STC-2000A DEPOSITION CONTROLLER y Processes: Factory settings vs. purged settings. The following example LCD displays show the difference between

p STC-2000A DEPOSITION CONTROLLER y screen will then appear at which time pressing the needed digit will select the next active process. Pressing th