Inficon XTM/2 Thin Film Deposition Monitor Manuel d'utilisateur

OPERATING MANUALXTM/2Deposition MonitorIPN 074-186

5 - 10 IPN 074-186S XTM/2 Operating Manualsustained as long as the gain provided by the amplifiers is sufficient to offset losses in the crystal and

5 - 11IPN 074-186SXTM/2 Operating ManualThe active oscillator circuit is designed so the crystal is required to produce a phase shift, θ, of 0 degre

5 - 12 IPN 074-186S XTM/2 Operating Manual5.5.6 ModeLock OscillatorINFICON has created a new technology7 that eliminates the active oscillator and i

6 - 1IPN 074-186SXTM/2 Operating ManualChapter 6Adjustments and ProblemsThe only user serviceable adjustment is the LCD contrast (see below). There

6 - 2 IPN 074-186S XTM/2 Operating Manual6.2.2 Parameter Update ErrorsERR 1 . . . . . Parameter out of range; the value attempted to be entered was

6 - 3IPN 074-186SXTM/2 Operating Manual6.3.1 Major Instrument Components, Assemblies and Mating ConnectorsFigure 6-1 Components, Assemblies and Ma

6 - 4 IPN 074-186S XTM/2 Operating Manual6.3.2 Troubleshooting the InstrumentTable 6-1 Troubleshooting the InstrumentSYMPTOM CAUSE REMEDY1. power o

6 - 5IPN 074-186SXTM/2 Operating Manual5. all keys on the front panel fail to functiona. instrument is "locked" up a. turn power to OFF or

6 - 6 IPN 074-186S XTM/2 Operating Manual9. crystal fail always on a. XIU/oscillator not connectedverify proper sensor/oscillator connectionsb. XIU/o

6 - 7IPN 074-186SXTM/2 Operating Manual6.3.3 Troubleshooting Transducers/SensorsNOTE: The most useful tool for diagnosing sensor head problems is t

TOC - 1IPN 074-186SXTM/2 Operating ManualTable Of ContentsChapter 1Introduction and Specifications1.1 Instrument Safety . . . . . . . . . . . . . .

6 - 8 IPN 074-186S XTM/2 Operating Manual2. crystal ceases to oscillate during deposition before it reaches its "normal" lifea. crystal str

6 - 9IPN 074-186SXTM/2 Operating Manual4. crystal oscillates in vacuum but stops oscillation after open to aira. crystal was near the end of its lif

6 - 10 IPN 074-186S XTM/2 Operating Manual6. poor thickness reproducibilitya. variable source flux distributiona. move sensor to a more central locat

6 - 11IPN 074-186SXTM/2 Operating Manual6.3.4 Troubleshooting Computer Communications8. CrystalSix, crystal switch problem (does not advance or not

6 - 12 IPN 074-186S XTM/2 Operating Manual2. error code returned a. A = illegal command a. the command sent was not valid; verify command syntax as s

6 - 13IPN 074-186SXTM/2 Operating Manualf. F = cannot change value nowf. the command sent is for a parameter that cannot be changed while the instru

6 - 14 IPN 074-186S XTM/2 Operating Manual6.3.5 Leaf Spring ConcernsSpring conditions should be observed as part of the routine maintenance interval

6 - 15IPN 074-186SXTM/2 Operating Manual6.4 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all transducers

6 - 16 IPN 074-186S XTM/2 Operating Manual6.4.1 Standard and CompactFollow the procedure below to replace the crystal in the Standard and Compact se

6 - 17IPN 074-186SXTM/2 Operating Manual6.4.2 Shuttered and Dual SensorsThere is no difference in the crystal changing procedure between shuttered

TOC - 2 IPN 074-186S XTM/2 Operating Manual2.4 XTM/2 Front Panel Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-92.4.1 XT

6 - 18 IPN 074-186S XTM/2 Operating Manual6.4.4 Sputtering SensorObserve the general precautions (section 6.4 on page 6-15) for replacing crystals a

6 - 19IPN 074-186SXTM/2 Operating Manual6.4.5 Crystal SnatcherTo use the crystal snatcher supplied with the sensor follow the instructions below (s

6 - 20 IPN 074-186S XTM/2 Operating Manual6.5 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2NOTE: 760-601-G1 (obsolete) is not compatible for u

6 - 21IPN 074-186SXTM/2 Operating Manual6.5.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator to analyz

6 - 22 IPN 074-186S XTM/2 Operating Manual6.5.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 6-8 on page 6-20. Remove the

6 - 23IPN 074-186SXTM/2 Operating Manual11 Connect the six-inch BNC cable to the Feed-Through and disconnect it from the Crystal Interface Unit (or

6 - 24 IPN 074-186S XTM/2 Operating Manual5 Connect the In-Vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from the finge

6 - 25IPN 074-186SXTM/2 Operating Manual6.5.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement system for I

6 - 26 IPN 074-186S XTM/2 Operating Manual6.5.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Temperature Range0

A - 1IPN 074-186SXTM/2 Operating ManualAppendix ATable of Densities and Z-ratiosThe following table represents the content of the instrument's

TOC - 3IPN 074-186SXTM/2 Operating Manual3.5.1 Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3

A - 2 IPN 074-186S XTM/2 Operating ManualBaTiO35.999 0.464 Barium Titanate (Tetr)BaTiO36.035 0.412 Barium Titanate (Cubic)Be 1.850 0.543 BerylliumBeF

A - 3IPN 074-186SXTM/2 Operating ManualCr 7.200 0.305 ChromiumCr2O35.210 *1.000 Chromium (111) OxideCr3C26.680 *1.000 Chromium CarbideCrB 6.170 *1.0

A - 4 IPN 074-186S XTM/2 Operating ManualGe3N25.200 *1.000 Germanium NitrideGeO26.240 *1.000 Germanium OxideGeTe 6.200 *1.000 Germanium TellurideHf 1

A - 5IPN 074-186SXTM/2 Operating ManualLu 9.840 *1.000 LutetiumMg 1.740 1.610 MagnesiumMgAl2O43.600 *1.000 Magnesium AluminateMgAl2O68.000 *1.000 Sp

A - 6 IPN 074-186S XTM/2 Operating ManualNiCr 8.500 *1.000 NichromeNiCrFe 8.500 *1.000 InconelNiFe 8.700 *1.000 PermalloyNiFeMo 8.900 *1.000 Supermal

A - 7IPN 074-186SXTM/2 Operating ManualSc2O33.860 *1.000 Scandiurn OxideSe 4.810 0.864 SeleniumSi 2.320 0.712 SiliconSi3N43.440 *1.000 Silicon Nitri

A - 8 IPN 074-186S XTM/2 Operating ManualTiB24.500 *1.000 Titanium BorideTiC 4.930 *1.000 Titanium CarbideTiN 5.430 *1.000 Titanium NitrideTiO 4.900

A - 9IPN 074-186SXTM/2 Operating ManualZnS 4.090 0.775 Zinc SulfideZnSe 5.260 0.722 Zinc SelenideZnTe 6.340 0.770 Zinc TellurideZr 6.490 0.600 Zirco

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Index - 1IPN 074-186SXTM/2 Operating ManualIndexAactive oscillator 5-9, 5-12anharmonic 5-6, 5-7, 5-11application support 1-10applications 2-22ATcrys

TOC - 4 IPN 074-186S XTM/2 Operating Manual5.4 Laboratory Determination of Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35.5 Measu

Index - 2 IPN 074-186S XTM/2 Operating Manualrear panel 2-13recorder output 1-6reference oscillator 5-8relays 3-14Remote command 3-26repair support 1

TOC - 5IPN 074-186SXTM/2 Operating Manual6.5.3.2 Incompatible Sensor Heads. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-256.5.4

TOC - 6 IPN 074-186S XTM/2 Operating Manual

1 - 1IPN 074-186SXTM/2 Operating ManualChapter 1Introduction and Specifications1.1 Instrument Safety1.1.1 Notes, Cautions, WarningsWhen using this

1 - 2 IPN 074-186S XTM/2 Operating Manual1.1.2 General Safety InformationWARNINGThere are no user serviceable components within the instrument case.

1 - 3IPN 074-186SXTM/2 Operating Manual1.1.3 Earth GroundThis instrument is connected to earth via a sealed three-core (three-conductor) power cabl

1 - 4 IPN 074-186S XTM/2 Operating Manual1.1.4 Main Power ConnectionWARNINGThis instrument has a line voltage present on the primary circuits whenev

1 - 5IPN 074-186SXTM/2 Operating Manual1.2 Introduction to the InstrumentThe XTM/2 is an economical quartz crystal transducer type deposition/etch

1 - 6 IPN 074-186S XTM/2 Operating Manual1.3 SpecificationsAt the time of this manual’s writing, the specifications for performance are as published

1 - 7IPN 074-186SXTM/2 Operating Manual1.3.1.4 Input/OutputInputs . . . . . . . . . . . . . . . . . . . . . . 5 TTL inputsOutputs. . . . . . . . .

1 - 8 IPN 074-186S XTM/2 Operating Manual1.3.1.8 OperationPower Requirements"115 V" input range. . . . . . . . . .90 to 132 V(ac), 49 to 6

1 - 9IPN 074-186SXTM/2 Operating Manual1.3.3 XIU (Crystal Interface Unit) SpecificationsThe XTM/2 Series instruments use a new type of "passiv

1 - 10 IPN 074-186S XTM/2 Operating Manual1.5 How To Contact Customer SupportIf you cannot find the answer to your question in this manual, please c

2 - 1IPN 074-186SXTM/2 Operating ManualChapter 2Quick Use Guide2.1 Unpacking, Initial Inspection and Inventory2.1.1 Unpacking and Inspection Proce

2 - 2 IPN 074-186S XTM/2 Operating Manual2.1.2.1 XTM/2 System ConfigurationBASIC CONFIGURATION IPN # CODE#115V 50/60 Hz 758-500-G1 1230V 50/60 Hz 75

2 - 3IPN 074-186SXTM/2 Operating Manual2.2 Voltage SelectionVoltage selection is required only between low (nominal 100-120 V) and high (nominal 20

OPERATING MANUALXTM/2Deposition MonitorTWO TECHNOLOGY PLACEEAST SYRACUSE, NY 13057-9714 USAPhone: +315.434.1100Fax: +315.437.3803Email: reachus@infic

2 - 4 IPN 074-186S XTM/2 Operating ManualTo inspect the fuse, proceed as follows.1 Pry open the power entry module cover. See Figure 2-1.Figure 2-1

2 - 5IPN 074-186SXTM/2 Operating Manual3 Inspect the fuse. See Figure 2-3.Figure 2-3 Clip, Fuse Holder, FuseThe Corcom fuse holder has chambers for

2 - 6 IPN 074-186S XTM/2 Operating ManualFigure 2-4 Proper Clip and Fuse LocationOnce the fuse and clip have been configured, the fuse holder is ins

2 - 7IPN 074-186SXTM/2 Operating Manual2.3 Installation Guide and SchematicMany experienced deposition monitor users will be able to fully install

2 - 8 IPN 074-186S XTM/2 Operating ManualFigure 2-5 Installation Guide SchematicSource ControllerSuch As ElectronBeam GunPower SupplyIEEE757-211-G1R

2 - 9IPN 074-186SXTM/2 Operating Manual2.4 XTM/2 Front Panel DescriptionFigure 2-6 Front Panel XTM/22.4.1 XTM/2 Front Control Panel Description1—

2 - 10 IPN 074-186S XTM/2 Operating Manual9—Access to adjust LCD contrast, see section 6.1 on page 6-1.10—Enter and cursor down. Two function switch

2 - 11IPN 074-186SXTM/2 Operating Manual2.4.2 XTM/2 Display DescriptionFigure 2-7 XTM/2 Display 1— RATE DISPLAY GROUPIndicates the deposition or e

2 - 12 IPN 074-186S XTM/2 Operating Manual8— PROGRAM MODE GROUPIndicator annunciator and cursor array for the definition of parameters.9— FILM GROUPI

2 - 13IPN 074-186SXTM/2 Operating Manual2.5 XTM/2 Rear Panel DescriptionThe rear panel provides the interface for all external connections to the i

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.INFICON®, CrystalSix® are trademarks of

2 - 14 IPN 074-186S XTM/2 Operating Manual2.5.1 Power ModuleAllows selection of optional voltages, contains the instrument fuse and provides modular

2 - 15IPN 074-186SXTM/2 Operating Manual2.5.2 Configuration Switches 1 & 2Two eight position DIP switches used to customize the instrument as f

2 - 16 IPN 074-186S XTM/2 Operating ManualTable 2-1 Configuration Switch SettingsSwitch 1 Test Mode (0 = off, 1 = on)Switch 2 Parameter Lock (0 = of

2 - 17IPN 074-186SXTM/2 Operating Manual2.5.3 Grounding StudRecommended point for connecting the system ground strap. For specific recommendations

2 - 18 IPN 074-186S XTM/2 Operating Manual2.5.4 System I/OA 25-pin male "D" type connector for interface connection. (See section 3.7 on p

2 - 19IPN 074-186SXTM/2 Operating Manual2.5.5 RS232A 9-pin female "D" type connector which enables the instrument to be controlled by a h

2 - 20 IPN 074-186S XTM/2 Operating Manual2.5.6 SensorHigh density 15-Pin female "D" type input connectors for intelligent oscillators (IP

2 - 21IPN 074-186SXTM/2 Operating Manual2.5.9 Comm. OptionLocation of optional computer interface, see section 3.8 on page 3-16 for setup details.F

2 - 22 IPN 074-186S XTM/2 Operating Manual2.6 Operation as a Deposition MonitorAlthough this instrument is designed as a vacuum deposition/etch moni

2 - 23IPN 074-186SXTM/2 Operating Manual2.6.2 Monitoring - Systems with a Source ShutterIn addition to measuring rate and thickness, these instrume

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. 2 Technology Place Eas

2 - 24 IPN 074-186S XTM/2 Operating Manual2.7 Nontraditional ApplicationsIn addition to their normal application as a deposition monitor/controller,

2 - 25IPN 074-186SXTM/2 Operating Manual2.7.3 BiologicalThe measurement of biological specimens is subject to many of the same problems as covered

2 - 26 IPN 074-186S XTM/2 Operating Manual2.7.6 Contamination DetectionThe measurement of a crystal’s mass loss or gain is enhanced by utilizing the

3 - 1IPN 074-186SXTM/2 Operating ManualChapter 3Installation3.1 Installing the Instrument - DetailsA general schematic of instrument installation i

3 - 2 IPN 074-186S XTM/2 Operating Manual3.2.1 Verifying / Establishing Earth GroundIf local facilities engineering cannot provide a low impedance e

3 - 3IPN 074-186SXTM/2 Operating ManualCAUTIONAn external ground connection is required to ensure proper operation, especially in electrically noisy

3 - 4 IPN 074-186S XTM/2 Operating Manual3.3 Connection to Rear PanelThe long term performance of this instrumentation is dependent on the quality o

3 - 5IPN 074-186SXTM/2 Operating Manual5 Coat the stripped portion of the wire(s) with the flux and insert into the solder cup of the contact until

3 - 6 IPN 074-186S XTM/2 Operating Manual3.4 Sensor Selection GuideThe choice of sensor type must be dictated by the process, the deposition materia

3 - 7IPN 074-186SXTM/2 Operating Manual3.5 Guidelines for Transducer InstallationWARNINGThe performance of this instrument depends on the careful i

3 - 8 IPN 074-186S XTM/2 Operating ManualFigure 3-3 Typical InstallationMounting BracketCoax Cable(Routed withWater Tubes)Or,Customer SuppliedCajon

3 - 9IPN 074-186SXTM/2 Operating ManualGenerally, install the sensor as far as possible from the evaporation source (a minimum of 10" or 254 mm

3 - 10 IPN 074-186S XTM/2 Operating Manual3.5.2 CrystalSixInstalling the CrystalSix transducer requires that the crystals be manually advanced. Foll

3 - 11IPN 074-186SXTM/2 Operating Manual3.5.3 Check List for Transducer Installation Mount the sensor to something rigid and fixed in the chamber.

3 - 12 IPN 074-186S XTM/2 Operating Manual3.6.1 Operational TestThe power switch should be in the STBY position before the instrument is connected t

3 - 13IPN 074-186SXTM/2 Operating Manual11 The time begins to increment from 00:00 and the deposition rate will be 16.1 Å/s. The THICK SPT annunciat

3 - 14 IPN 074-186S XTM/2 Operating Manual3.7 Input and Output Details3.7.1 RelaysWARNINGThe relay, relay circuit, and associated pins in the I/O c

3 - 15IPN 074-186SXTM/2 Operating Manual3.7.2 InputsInputs are activated by pulling the specific input's terminal to ground (<0.8V) through

3 - 16 IPN 074-186S XTM/2 Operating Manual3.8 Computer CommunicationsThis instrument supports a number of standard and optional computer communicati

3 - 17IPN 074-186SXTM/2 Operating Manual3.8.1.1 IEEE Settings for a National Instruments IEEE-GPIB BoardWhen establishing IEEE communications the f

Registration CardTWO TECHNOLOGY PLACEEAST SYRACUSE, NY 13057-9714 USAPhone: +315.434.1100Fax: +315.437.3803Email: [email protected] LANDSTRASSE

3 - 18 IPN 074-186S XTM/2 Operating Manual3.8.2 Basic Command StructureThe following commands are available via the computer communications:E . . .

3 - 19IPN 074-186SXTM/2 Operating ManualIEEE488 FORMAT (Message Protocol)To XTM/2: message_string LF d10 (CHR$10)From XTM/2: message_string LF (if s

3 - 20 IPN 074-186S XTM/2 Operating Manual3.8.3 Service Requests and Message AvailableIn the IEEE mode there are a number of events which will trigg

3 - 21IPN 074-186SXTM/2 Operating Manual3.8.4 DataloggingData logging may be configured to be automatic, see section 3.8.1 on page 3-16. The RS232

3 - 22 IPN 074-186S XTM/2 Operating Manual3.8.5 Computer Command Details3.8.5.1 Echo CommandEchoes the message, i.e., returns the sent message. The

3 - 23IPN 074-186SXTM/2 Operating Manual3.8.5.4 Update CommandThe format of the update command is:U P F vvv.Update parameter P of film F, with valu

3 - 24 IPN 074-186S XTM/2 Operating ManualS 6. . . . . Output status - returns 8 ASCII bytes each with a value of 0 or 1.S 7. . . . . Input status

3 - 25IPN 074-186SXTM/2 Operating ManualS 10 . . . . Present configuration switch settings—returns 16 ASCII bytes with a value of 0 or 1, correspond

3 - 26 IPN 074-186S XTM/2 Operating Manual3.8.5.6 Remote CommandThe format of the remote command is:R xx # . . A space is used as a delimiter betw

3 - 27IPN 074-186SXTM/2 Operating Manual3.8.6 Examples of RS232 Programs10 ’----XTM/2 RS232 COMMUNICATIONS PROGRAM WITHOUT CHECKSUM----20 ’30 ’----

BUSINESS REPLY MAILFIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORKPOSTAGE WILL BE PAID BY ADDRESSEEINFICON INC.Two Technology PlaceEast Syracuse, Ne

3 - 28 IPN 074-186S XTM/2 Operating Manual10 ’--XTM/2 RS232 COMMUNICATIONS PROGRAM WITH CHECKSUM USING THE INFICON FORMAT--20 ’30 ’------THIS PROGRAM

3 - 29IPN 074-186SXTM/2 Operating Manual3.8.6.1 Example of SEMI II Program10 ’XTM/2 RS232 COMMUNICATIONS PROGRAM USING THE SECS FORMAT20 ’———THIS P

3 - 30 IPN 074-186S XTM/2 Operating Manual610 IF LOC(1) < 1 THEN 610 ELSE TIMER OFF: I$ = INPUT$(1, #1)620 IF C = 3 THEN 660630 IF I$ = ACK$ THEN

3 - 31IPN 074-186SXTM/2 Operating Manual3.8.7 Example of IEEE488 Program10 ’----------------------XTM/2 GPIB COMMUNICATIONS PROGRAM----------------

3 - 32 IPN 074-186S XTM/2 Operating ManualTo implement serial polling of the Request for Service bit you need only test for the RQS bit to be set.For

4 - 1IPN 074-186SXTM/2 Operating ManualChapter 4Programming System Operation Details4.1 State and Measurement System SequencingThe following pages

4 - 2 IPN 074-186S XTM/2 Operating ManualFigure 4-2 State Diagram for a FilmNOTE: The flow diagram presented, while generally accurate, is not compl

4 - 3IPN 074-186SXTM/2 Operating Manual4.2 State DescriptionsOperating the XTM/2 as a film thickness/rate monitor requires programing the film para

4 - 4 IPN 074-186S XTM/2 Operating Manual4.3 Parameter LimitsThe variable parameters and their limits are listed below. The two thickness (mass) par

4 - 5IPN 074-186SXTM/2 Operating Manual4.5 Crystal Fail InhibitIn many coating plants the crystal fail output relay closure is given major importan

WarrantyTWO TECHNOLOGY PLACEEAST SYRACUSE, NY 13057-9714 USAPhone: +315.434.1100Fax: +315.437.3803Email: [email protected] LANDSTRASSE 6LI-9496

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5 - 1IPN 074-186SXTM/2 Operating ManualChapter 5Calibration and Measurement5.1 Importance of Density, Tooling and Z-ratioThe quartz crystal microba

5 - 2 IPN 074-186S XTM/2 Operating Manual6 Determine the new density value with the following equation:[1]where:D1 = Initial density settingTx = Thic

5 - 3IPN 074-186SXTM/2 Operating Manual5.4 Laboratory Determination of Z-ratioA list of Z-values for materials commonly used is available in Append

5 - 4 IPN 074-186S XTM/2 Operating ManualFor multiple layer deposition (for example, two layers), the Z-value used for the second layer is determined

5 - 5IPN 074-186SXTM/2 Operating ManualSimple substitutions lead to the equation that was used with the first “frequency measurement” instruments: [

5 - 6 IPN 074-186S XTM/2 Operating Manual5.5.2 Monitor CrystalsNo matter how sophisticated the electronics surrounding it, the essential device of t

5 - 7IPN 074-186SXTM/2 Operating Manualresponse at about three times the frequency of the fundamental is called the third quasiharmonic. There are a

5 - 8 IPN 074-186S XTM/2 Operating ManualThe “AT” resonator is usually chosen for deposition monitoring because at room temperature it can be made to

5 - 9IPN 074-186SXTM/2 Operating Manualsame order of size as the measurement precision, it is not possible to establish quality rate control. The un