Inficon Maxtek PM-700 Plating Monitor Manuel d'utilisateur

11980 Telegraph Road, Suite 104 Santa Fe Springs, CA 90670-6084 Tel: (562) 906-1515 • Fax: (562) 906-1622 http://www.maxtekinc.com Email: sales@maxt

PM-700 SERIES PLATING MONITOR 21.1 SPECIFICATIONS PM-700 Series Common Specifications Monitor accuracy: 0.5 % Basic measurement resolution

PM-700 SERIES PLATING MONITOR 3 Plate/Deplate Current Supply: Range: 0 to ± 22.12 ma. 0 to ± 1.615 ASD (amp per sq. decimete

PM-700 SERIES PLATING MONITOR 52. UNPACKING, INSPECTION AND BENCH CHECKOUT 2.1 UNPACKING, INSPECTION Carefully inspect your plating monitor and its

PM-700 SERIES PLATING MONITOR 6 Figure 1 Power Switch and AC Connector You may see an E FAIL or I FAIL message for a short time, this is normal. H

PM-700 SERIES PLATING MONITOR 7the monitor has been interrupted. The red light in the Probe Status window and the O FAIL message indicates a problem

PM-700 SERIES PLATING MONITOR 8 Figure 3 PM-700 Front Panel Outline

PM-700 SERIES PLATING MONITOR 9 Figure 4 PM-720 & PM-740 Rear Panel Outline

PM-700 SERIES PLATING MONITOR 10 Figure 5 Typical System Setup

PM-700 SERIES PLATING MONITOR 11 Figure 6 Parameter Menu Layout

© 1992-2000 MAXTEK, INC. All rights reserved. First Edition, August 1992 Second Edition, Revision A, March 1993 Third Edition, Revision B

PM-700 SERIES PLATING MONITOR 133. SIMPLIFIED OPERATION This section is designed to help first time user of the PM-700 Series Plating Monitor to beco

PM-700 SERIES PLATING MONITOR 14Table 1 Process 2 Parameter Default Values Menu Parameter Default Value Mode Menu Sample Off Mode Menu Measure

PM-700 SERIES PLATING MONITOR 153.1 SAMPLE PROCESS Suppose a PM-700 monitor is to be used to continuously measure the plating rate and thickness in a

PM-700 SERIES PLATING MONITOR 17

PM-700 SERIES PLATING MONITOR 184. DETAILED OPERATION 4.1 INTRODUCTION AND GENERAL CONCEPTS Basic operation of the PM-700 monitors is straightforwa

PM-700 SERIES PLATING MONITOR 19 Figure 7 Front Panel Buttons

PM-700 SERIES PLATING MONITOR 20Select Buttons Select Buttons are used to step between parameter items. Modify Buttons Modify Buttons are used to s

PM-700 SERIES PLATING MONITOR 214.4.1 Monitor Operating States The PM-700 can be in any one of a number of Operating States depending upon the type

vWARRANTY Maxtek, Inc. warrants the product to be free of functional defects in material and workmanship and that it will perform in accordance with

PM-700 SERIES PLATING MONITOR 224.4.1.2 Electrolytic plating Because the Preplate State is not necessary in the Electrolytic plating mode, the Prepl

PM-700 SERIES PLATING MONITOR 234.4.2.1.2 Sample This mode is used to increase the crystal's range. In the Sample mode the plating rate is moni

PM-700 SERIES PLATING MONITOR 24In this mode both probes are actively monitoring the plating process. The monitor compares the two probes and compu

PM-700 SERIES PLATING MONITOR 254.4.3.2.3 Deplate mode In the Probe Deplate mode, enough negative electrode current is supplied by the monitor to cre

PM-700 SERIES PLATING MONITOR 264.4.4.4 Frequency In this Main Display mode the left-hand display is used to display the crystal frequency in Megahe

PM-700 SERIES PLATING MONITOR 274.4.5.6 A-B)% Display This display mode is only available on dual probe model monitors. In the Dual Probe measuremen

PM-700 SERIES PLATING MONITOR 28This feature allows for very fine setting over a very broad range in a minimum amount of time. 4.5.2 Hidden paramete

PM-700 SERIES PLATING MONITOR 29 Figure 8 Graph of Interval Time and Dwell Time %

PM-700 SERIES PLATING MONITOR 304.5.3.1 Mode Menu Numonic Name/Description Minimum Maximum Default Sample Sample Allows the user to turn the moni

PM-700 SERIES PLATING MONITOR 31Mode Allows for selection of one of the three measuring modes listed in the Minimum column. For detail description

Table of Contents 1. GENERAL DESCRIPTION ...1 1.1 SPEC

PM-700 SERIES PLATING MONITOR 324.5.3.2 Process Menu Numonic Name/Description Minimum Maximum Default Process Process The plating monitor is capa

PM-700 SERIES PLATING MONITOR 33parameter allows the user to set the maximum allowable plating rate. The displayed rate will flash rapidly, and the

PM-700 SERIES PLATING MONITOR 344.5.3.3 Bath Menu Numonic Name/Description Minimum Maximum Default Bath Bath This parameter contains a list of r

PM-700 SERIES PLATING MONITOR 35Density Material Density Allows setting of the density of the material being plated so that the monitor can calculate

PM-700 SERIES PLATING MONITOR 364.5.3.4 Display Menu Numonic Name/Description Minimum Maximum Default Main Display Main Display Mode This paramet

PM-700 SERIES PLATING MONITOR 374.5.3.5 Setup Menu Numonic Name/Description Minimum Maximum Default Crystal Type Crystal Type Allows the user to s

PM-700 SERIES PLATING MONITOR 38DAC Thckness Range Digital to Analog Converter Thickness Range Establishes the full scale value of the DAC. See Dig

PM-700 SERIES PLATING MONITOR 394.5.4 Restoring to Default Values The four material parameters, Tooling Factor, Density, Acoustic Impedance and Elec

PM-700 SERIES PLATING MONITOR 404.7 SWAPPING PROBES Swapping from the current active probe to the Standby probe can be manually initiated at any tim

PM-700 SERIES PLATING MONITOR 41pressing the Stop button or the ongoing active process may be inadvertently terminated. 4.7.2 Automatic probe swappi

vii4.4.5.6 A-B)% Display ... 27 4.4.6

PM-700 SERIES PLATING MONITOR 42Table 3 Discrete Input Connector Pin Assignments Pin Number Signal Name 1 Start Plate 2 Start PrePlate 3 Start DeP

PM-700 SERIES PLATING MONITOR 434.8.2 Discrete Outputs There are six Discrete Outputs available. These outputs will become true when the monitor has

PM-700 SERIES PLATING MONITOR 44 Table 4 Discrete Output Connector Pin Assignments Pin Number Signal Name 1 PrePlate achieved 2 Thickness achieved

PM-700 SERIES PLATING MONITOR 454.8.3 Digital to Analog Converters Two independent Digital to Analog Converters (DAC's) are provided, one for R

PM-700 SERIES PLATING MONITOR 46 Table 5 DAC I/O Connector Pin Assignments Pin Number Signal Name 1 Thickness 2 Return (GND) 3 Rate 4 Return (GND)

PM-700 SERIES PLATING MONITOR 474.8.4 Computer Connection A 9 pin, D shell, male connector (IBM AT type) is provided as an RS-232 serial port. A sta

PM-700 SERIES PLATING MONITOR 484.8.4.1 RS-232 Interface The PM-700 Series Plating Monitor will communicate through a standard RS-232 Serial I/O por

PM-700 SERIES PLATING MONITOR 494.8.4.3 Remote Control 4.8.4.3.1 Upload Parameter Store (Instruction 10h) This operation outputs the entire paramete

PM-700 SERIES PLATING MONITOR 50No. Position Description Length (Bytes) Decimal Point Pos. 24 62 Parameter/Status display 1 N/A 25 63 Crystal

PM-700 SERIES PLATING MONITOR 51Table 8 Select Parameter codes Select Parameter Number Description Ag 156 Silver As 157 Arsenic Au+1 158 Gold wit

6.1.3 Thickness Calculation ...67 6.1.4 Rate Calculat

PM-700 SERIES PLATING MONITOR 52Select Parameter Number Description Zn 184 Zinc Special1 185 For material not listed Special2 186 For material

PM-700 SERIES PLATING MONITOR 53Select Parameter Number Description 64 Display Menu 65 Setup Menu Thickness Units 191 K⊕ 192 µinch 193 Micron

PM-700 SERIES PLATING MONITOR 544.8.4.3.2 Restore Parameter Store (Instruction 20h) This operation inputs the entire parameter store from the host

PM-700 SERIES PLATING MONITOR 55 Header (2 bytes) Instruction Code(1 byte) Message Length (1 byte) Command Code or Message Checksum (1 byte) FFh FEh

PM-700 SERIES PLATING MONITOR 560 Ready flag 1 Deplate flag 2 Internal 3 Preplate flag 4 Plate flag 5 Internal 6 Internal 7 Internal Table 12 Failur

PM-700 SERIES PLATING MONITOR 571 Internal 2 Internal 3 Internal 4 Auto complete flag 5 Excess current flag 6 Sample probe flag 7 Internal Table 1

PM-700 SERIES PLATING MONITOR 581 Negative current A 2 Positive current B 3 Negative current B 4 Internal 5 Internal 6 Internal 7 Internal To in

PM-700 SERIES PLATING MONITOR 594.8.4.5 Data Logging 4.8.4.5.1 Establish automatic data logging This operation allows the computer to setup the pla

PM-700 SERIES PLATING MONITOR 60Table 18 Data Logging Bit Map Byte No. Bit No. Description Units Length (Bytes) Decimal Point Pos. 1 0 Display thi

PM-700 SERIES PLATING MONITOR 61The displayed rate, thickness, and efficiency values are absolute. Their negative sign bits are stored in the probe

ix List of Figures FIGURE 1 POWER SWITCH AND AC CONNECTOR ...6 FIGURE 2 FR

PM-700 SERIES PLATING MONITOR 62To terminate the automatic data logging, the host computer would send the following message: Header (2 bytes) Instru

PM-700 SERIES PLATING MONITOR 635. TROUBLESHOOTING This section is included to help isolate, as rapidly as possible, any failures that may occur in t

PM-700 SERIES PLATING MONITOR 644. Faulty DAC outputs: External recording equipment puts an excessive load on the DAC. Improper DAC wiring. Progra

PM-700 SERIES PLATING MONITOR 65Note that it is normal for the power failure message to flash when the unit is first turned on. Press the STOP butto

PM-700 SERIES PLATING MONITOR 66Probe B is repaired, press Probe B button will clear the red LED and the yellow LED should come on.

PM-700 SERIES PLATING MONITOR 676. APPENDIX 6.1 THEORY OF THE QUARTZ CRYSTAL MICROBALANCE 6.1.1 Crystal Frequency The monitor uses a quartz crystal

PM-700 SERIES PLATING MONITOR 68 crystal vibrating in the thickness shear mode. ρq = Density of quartz (gm/cm3). fq = Resonant

PM-700 SERIES PLATING MONITOR 69 where: Rz = The acoustic impedance ratio which is obtained by dividing the acoustic impedance of quartz by the acou

PM-700 SERIES PLATING MONITOR 70To calibrate the monitor; material density, tooling factor and acoustic impedance must be established in that order.

PM-700 SERIES PLATING MONITOR 713. Measure the actual thickness of the plating. 4. If the displayed thickness is lower than the measured thickness,

PM-700 SERIES PLATING MONITOR 726.3 LIST OF MATERIAL CONSTANTS Table 21 Material Constants Material Symbol Density Impedance ElecChem* Antimony Sb

PM-700 SERIES PLATING MONITOR 73Zinc Zn 7.14 17.18 1.219 Special1 1.00 8.83 1.000 Special2 1.00 8.83 1.000 Special3 1.00 8.83 1.000 Special4 1.00

PM-700 SERIES PLATING MONITOR 74DATA LOG Process/ Material PrePlate Thickness Plating Endpoint Thickness Material Density Acoustic Impedance Tooling

PM-700 SERIES PLATING MONITOR 75

PM-700 SERIES PLATING MONITOR 11. GENERAL DESCRIPTION The PM-700 Series of Plating Monitors act like intelligent electronic coupon systems. The moni