Inficon XTC/3 Thin Film Deposition Controller Software Edi Manuel d'utilisateur

OPERATING MANUALXTC/3 EditorXTC/3 Configuration Editing SoftwareIPN 074-452-P1

TOC - 1IPN 074-452-P1AXTC/3 Editor Operating ManualTable Of ContentsChapter 1Getting Started1.1 Introduction. . . . . . . . . . . . . . . . . . . .

TOC - 2 IPN 074-452-P1A XTC/3 Editor Operating Manual3.6 Editing the I/O Map Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1 - 1IPN 074-452-P1AXTC/3 Editor Operating ManualChapter 1Getting Started1.1 IntroductionThe XTC/3™ Editor is a Microsoft® Windows®-based applicati

1 - 2 IPN 074-452-P1A XTC/3 Editor Operating Manual1.1.1 How To Contact Customer SupportIf you have a question about your software, first refer to t

1 - 3IPN 074-452-P1AXTC/3 Editor Operating Manual1.2 Operating Manual Style ConventionsFile names, diskette labels, environment variables, program

1 - 4 IPN 074-452-P1A XTC/3 Editor Operating Manual1.3 Inventory Of Supplied ItemsYou should have one CD ROM (or may have floppy disks) which contai

1 - 5IPN 074-452-P1AXTC/3 Editor Operating Manual1.5 XTC/3 Requirements1.5.1 FirmwareThe XTC/3 firmware must be Version 1.00 or higher.1.5.2 Thin

1 - 6 IPN 074-452-P1A XTC/3 Editor Operating Manual1.7 How To Install The XTC/3 EditorInstall the XTC/3 Editor from within Windows as follows:NOTE:

1 - 7IPN 074-452-P1AXTC/3 Editor Operating Manual1.8 The Software ControlsThe XTC/3 Editor software utilizes some common Windows controls as well a

1 - 8 IPN 074-452-P1A XTC/3 Editor Operating Manual. . . . . . . . . . . . . . . . . . . . . . . Radio buttons. These buttons are used to accept a si

1 - 9IPN 074-452-P1AXTC/3 Editor Operating Manual . . . . . . . . . . . . . . . Grid. The grid is a row and column collection of cells of related da

1 - 10 IPN 074-452-P1A XTC/3 Editor Operating Manual1.9 How To Start The XTC/3 EditorTo start the XTC/3 Editor select Start >> Programs >&g

1 - 11IPN 074-452-P1AXTC/3 Editor Operating Manual1.10 Where To Go From HereThis Operating Manual is intended to make the process of setting up, in

1 - 12 IPN 074-452-P1A XTC/3 Editor Operating ManualThis page is intentionally blank.

2 - 1IPN 074-452-P1AXTC/3 Editor Operating ManualChapter 2Setup2.1 IntroductionWhen the XTC/3 Editor is first installed on a system, there are a fe

2 - 2 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 2-2 Add a Com PortNOTE: Communication problems often occur when other programs (for exampl

2 - 3IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 2-3 System Properties PageThree buttons are provided on the Port Settings tab which affect

2 - 4 IPN 074-452-P1A XTC/3 Editor Operating Manual2.2.1 Adding A Communications Port and ControllersClicking on the Add Port button will bring up t

2 - 5IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 2-5 System Properties with added portsThe IP address of each XTC/3 instrument connected to

OPERATING MANUALXTC/3 EditorXTC/3 Configuration Editing SoftwareIPN 074-452-P1AGLOBAL HEADQUARTERS:Two Technology Place, East Syracuse, NY 13057 USA

2 - 6 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 2-6 Ethernet Communication PropertiesAfter typing the IP address of the XTC/3 instrument,

2 - 7IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 2-8 XTC/3 Instruments Added through EthernetThe display then returns to the Port Settings t

2 - 8 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 2-9 System Properties: Port addedFor Serial Communications (RS-232), the port properties c

2 - 9IPN 074-452-P1AXTC/3 Editor Operating Manual2.2.2 RS-232 Communications Port PropertiesFigure 2-10 shows the properties of the Communications

2 - 10 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 2-11 Com Properties: Controllers tabThe Controllers tab (refer to Figure 2-11) allows for

2 - 11IPN 074-452-P1AXTC/3 Editor Operating ManualThe AutoDetect check box (see Figure 2-12) specifies that the software should periodically check t

2 - 12 IPN 074-452-P1A XTC/3 Editor Operating ManualThe Data Settings page (Figure 2-14), accessible by selecting Properties, allows the configuratio

2 - 13IPN 074-452-P1AXTC/3 Editor Operating ManualMarks . . . . . . . . . . . . . . . . . . . . . . . . When checked, if a mark is automatically ins

2 - 14 IPN 074-452-P1A XTC/3 Editor Operating Manual2.4 User PreferencesThe System Properties pages allow the customization of several global (that

2 - 15IPN 074-452-P1AXTC/3 Editor Operating ManualScreen LayoutThis section allows the specification of which screen elements are displayed when the

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.XTC/3™ is a trademark and INFICON® is a

2 - 16 IPN 074-452-P1A XTC/3 Editor Operating ManualBackground . . . . . . . . . . . . . . . . . . Set the background color for the graphs. A standa

2 - 17IPN 074-452-P1AXTC/3 Editor Operating Manual2.4.2 Miscellaneous User OptionsFigure 2-16 System Properties, Miscellaneous TabData file increm

2 - 18 IPN 074-452-P1A XTC/3 Editor Operating Manual2.4.3 Access LevelsThe XTC/3 Editor can be operated from one of two Access Levels — Advanced or

3 - 1IPN 074-452-P1AXTC/3 Editor Operating ManualChapter 3Editing Configurations3.1 IntroductionThis chapter describes the Configuration Editor and

3 - 2 IPN 074-452-P1A XTC/3 Editor Operating Manual3.2 Using the Configuration EditorThe Configuration Editor is invoked by selecting File >>

3 - 3IPN 074-452-P1AXTC/3 Editor Operating ManualHINT: When editing a Configuration for an attached Controller, the best starting point is the choic

3 - 4 IPN 074-452-P1A XTC/3 Editor Operating Manualopen an existing Configuration file select Open; to create a new Configuration from scratch select

3 - 5IPN 074-452-P1AXTC/3 Editor Operating Manual3.3 Configuration Editor Main Window Figure 3-8 shows the Main Window of the Configuration Editor.

3 - 6 IPN 074-452-P1A XTC/3 Editor Operating ManualAll of the parameters can be listed within the Main Window by clicking on each plus sign [+] at th

3 - 7IPN 074-452-P1AXTC/3 Editor Operating Manualediting a Configuration for a controller which is off-line, or if blank is selected, any bounds che

GLOBAL HEADQUARTERS:Two Technology Place, East Syracuse, NY 13057 USATel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: [email protected] us

3 - 8 IPN 074-452-P1A XTC/3 Editor Operating ManualSend All. . . . . . . . . . . . . . . . . . . . . . This will, if a controller is attached, send t

3 - 9IPN 074-452-P1AXTC/3 Editor Operating Manual3.4 ToolBar DescriptionAt the top of every dialog box, there is a toolbar that contains, from left

3 - 10 IPN 074-452-P1A XTC/3 Editor Operating Manual3.5 Editing the General ParametersFigure 3-12 shows the General Parameters dialog box of the XTC

3 - 11IPN 074-452-P1AXTC/3 Editor Operating Manual3.6 Editing the I/O Map ParametersFigure 3-13 shows the I/0 Map dialog box of the XTC/3 Editor. N

3 - 12 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 3-14 A set of 6 reserved inputs associated with the Sel Process(99) input #3Figure 3-15

3 - 13IPN 074-452-P1AXTC/3 Editor Operating Manual3.7 Editing Film ParametersFigure 3-16 shows the Film 1 parameter set for the XTC/3 Editor. The F

3 - 14 IPN 074-452-P1A XTC/3 Editor Operating Manual3.8 Creating a Process (XTC/3M Only)To create a Process, right-click on one of the processes and

3 - 15IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 3-19 Adding LayersIf there are already layers, add new layers at a certain position by sel

3 - 16 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 3-21 ResultA layer (on the right side) can be moved up or down by first selecting it and

3 - 17IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 3-23 ResultTo rename a process, select the process, right-click and select Rename Process

BUSINESS REPLY MAILFIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORKPOSTAGE WILL BE PAID BY ADDRESSEEINFICON INC.Two Technology PlaceEast Syracuse, Ne

3 - 18 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 3-25 Editing a Process NameIn Figure 3-24 the Empty Process menu item is grayed out. This

3 - 19IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 3-27 Pasting a Process to Several Other ProcessesIn this example, the result will show tha

3 - 20 IPN 074-452-P1A XTC/3 Editor Operating ManualThe content of an individual process can be sent to the controller. Select a process, right click

4 - 1IPN 074-452-P1AXTC/3 Editor Operating ManualChapter 4 Monitor4.1 IntroductionThe XTC/3 Editor includes a Monitor, which collects and stores si

4 - 2 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 4-2 Monitor Screen LayoutData collection from the XTC/3 is done for six data parameters. O

4 - 3IPN 074-452-P1AXTC/3 Editor Operating ManualThe following data are collected from the XTC/3 for each controller:Rate . . . . . . . . . . . . .

4 - 4 IPN 074-452-P1A XTC/3 Editor Operating ManualRemoving a display from the view has no effect on the collection of that data (it is still collect

4 - 5IPN 074-452-P1AXTC/3 Editor Operating ManualThe maximum file size allowed for any data file is 11MB. It is the responsibility of the user to ma

4 - 6 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 4-9 Set Mark DialogFigure 4-10 Mark Indicator on Graph4.2.4.3 The Pause and Start/Stop C

4 - 7IPN 074-452-P1AXTC/3 Editor Operating ManualThe Start/Stop button (see Figure 4-11) on the Control Panel serves a dual purpose. When data is be

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

4 - 8 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 4-12 Monitor, Edit Configuration Choices4.3.1 Edit Current ConfigurationMonitor >>

4 - 9IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 4-13 Recalling a Data FileAfter a data file is opened, the data cursor can be used to displ

4 - 10 IPN 074-452-P1A XTC/3 Editor Operating ManualWARNINGRecall and manipulation of very large data files, while collecting data, may cause the sys

4 - 11IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 4-16 Generating a Report - SOD Data selectionsIf live data are being displayed, the Input

4 - 12 IPN 074-452-P1A XTC/3 Editor Operating ManualEnter the step size in the Scan Step Size box. Enter 1 to report every scan, 2 to report every ot

4 - 13IPN 074-452-P1AXTC/3 Editor Operating ManualNOTE: The Report Generator creates text files, from data files, in two possible formats - tab deli

4 - 14 IPN 074-452-P1A XTC/3 Editor Operating Manual4.6 The Event Log When an error or event on one of the Controllers is detected, an Event window

4 - 15IPN 074-452-P1AXTC/3 Editor Operating ManualFigure 4-20 Sample Event Log FileLog files contain Errors, Warnings, Events, I/O Events, Marks, a

4 - 16 IPN 074-452-P1A XTC/3 Editor Operating ManualFigure 4-22 View after selecting Log View Options

Index - 1IPN 074-452-P1AXTC/3 Editor Operating ManualIndexAAbout "Shortcuts" 1-10Access Levels 2-18Auto Save Monitor setting 4-4AutoDetect

Index - 2 IPN 074-452-P1A XTC/3 Editor Operating ManualFFonts, Selecting 2-16Foreground Color, Selecting 2-15Freeze button 4-6GGeneral Parameters, ed

For Customer Support, contact the INFICON office nearest to you. Customer Support information is also available at www.inficon.com.North AmericaUSA —