Inficon XTC/C Thin Film Deposition Controller Manuel d'utilisateur

OPERATING MANUALXTC/C XTC/2Thin Film Deposition ControllerIPN 074-183XTC/CXTC/2

3 - 36 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.6.3 Example of SEMI II Program10 ’XTC/2 RS232 COMMUNICATIONS PROGRAM USING THE SECS FORMAT20 ’

3 - 37IPN 074-183XXTC/C - XTC/2 Operating Manual610 IF LOC(1) < 1 THEN 610 ELSE TIMER OFF: I$ = INPUT$(1, #1)620 IF C = 3 THEN 660630 IF I$ = ACK

3 - 38 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.7 Example of IEEE488 Program10 ’----------------------XTC/2 GPIB COMMUNICATIONS PROGRAM-------

3 - 39IPN 074-183XXTC/C - XTC/2 Operating ManualFor example:(serial poll)CALL IBRSP (XTC2%,SPR%)B = SPR% / 64 : B = INT(B)IF B = 1 THEN (continue pr

3 - 40 IPN 074-183X XTC/C - XTC/2 Operating ManualFigure 3-8 Interconnecting Two XTC/2 Units for Co-Deposition

4 - 1IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 4Programming System Operation Details4.1 State and Measurement System SequencingThe followin

4 - 2 IPN 074-183X XTC/C - XTC/2 Operating ManualFigure 4-2 State Diagram for a Film

4 - 3IPN 074-183XXTC/C - XTC/2 Operating ManualFigure 4-3 State Diagram for a Film (continued)

4 - 4 IPN 074-183X XTC/C - XTC/2 Operating ManualFigure 4-4 Display LoopThe Measurement and Control Loop is characterized by its time-critical natur

4 - 5IPN 074-183XXTC/C - XTC/2 Operating ManualFigure 4-5 Measurement and Control Processing Loop

TOC - 1IPN 074-183XXTC/C - XTC/2 Operating ManualTable Of ContentsChapter 1Introduction and Specifications1.1 Instrument Safety . . . . . . . . . .

4 - 6 IPN 074-183X XTC/C - XTC/2 Operating Manual4.2 State Descriptions and Parameter LimitsOperating the XTC as a film thickness/rate controller re

4 - 7IPN 074-183XXTC/C - XTC/2 Operating Manual10.RATE RAMP TIMERate control, desired rate changing. [Thick Spt, New Rate, R.Ramp Time]Closed Closed

4 - 8 IPN 074-183X XTC/C - XTC/2 Operating ManualThe following variable parameters and their limits are listed below. If a value outside the stated l

4 - 9IPN 074-183XXTC/C - XTC/2 Operating Manual4.3 Alarms and StopsThere are a number of unusual instrument situations that may require operator at

4 - 10 IPN 074-183X XTC/C - XTC/2 Operating Manual4.4 Recovering From "STOPS"These instruments have the ability to complete a process (rec

4 - 11IPN 074-183XXTC/C - XTC/2 Operating Manual4.5 Tuning the Control LoopThe function of the control loop parameters is to match the instrument’s

4 - 12 IPN 074-183X XTC/C - XTC/2 Operating ManualCTL GAIN . . approximate the process gain by dividing the increase in deposition rate (Å/sec) by th

4 - 13IPN 074-183XXTC/C - XTC/2 Operating ManualAs illustrated in Figure 5-7 on page 5-13, the control dead time, L, is the time delay between a cha

4 - 14 IPN 074-183X XTC/C - XTC/2 Operating Manual4.5.3 Setting Maximum PowerThe MAX PWR parameter is generally used to ensure that no significant d

4 - 15IPN 074-183XXTC/C - XTC/2 Operating Manual4.6.1 Q-Factor (Quality)The Q-Factor is a measure of the quality of the rate control of the active

TOC - 2 IPN 074-183X XTC/C - XTC/2 Operating Manual2.1.2.3 Ship Kit - XTC/2 XTC/C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4 - 16 IPN 074-183X XTC/C - XTC/2 Operating Manual4.6.2 S-Factor (Stability)Normally, as material is deposited on a crystal its operating frequency

4 - 17IPN 074-183XXTC/C - XTC/2 Operating ManualFigure 4-8 shows temperature versus frequency relationship for an AT cut crystal. Figure 4-8 Freque

4 - 18 IPN 074-183X XTC/C - XTC/2 Operating Manualaccumulator does not retain its values, but rather, builds up when the rate deviation exceeds its s

4 - 19IPN 074-183XXTC/C - XTC/2 Operating ManualFor example, if the Q factor parameter has a value of 5 and the rate control varies by more than ±12

4 - 20 IPN 074-183X XTC/C - XTC/2 Operating ManualWhen in READY, a crystal switch is activated by depressing the red button on the body of the contro

4 - 21IPN 074-183XXTC/C - XTC/2 Operating Manual4.9.3 Setting Idle Power ParametersAfter a deposit has completed, it may be necessary to slowly red

4 - 22 IPN 074-183X XTC/C - XTC/2 Operating Manual4.11 Crystal FailWhenever the ModeLock measurement system is unable to effectively identify and dr

4 - 23IPN 074-183XXTC/C - XTC/2 Operating Manual4.13 Crystal Fail InhibitIn many coating plants the crystal fail output relay closure is given majo

4 - 24 IPN 074-183X XTC/C - XTC/2 Operating Manual4.15 Crystal Switch DetailsA crystal switch will automatically occur when: The instrument is conf

4 - 25IPN 074-183XXTC/C - XTC/2 Operating Manual4.15.1 Sensor Shutter / CrystalSwitch OutputThe function of the Sensor Shutter outputs depend on th

TOC - 3IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 3Installation3.1 Installing the Instrument - Details . . . . . . . . . . . . . . . . . . .

4 - 26 IPN 074-183X XTC/C - XTC/2 Operating Manual4.16 Start Layer Without Backup Crystal ConfigurationThese instruments allow the option of automat

4 - 27IPN 074-183XXTC/C - XTC/2 Operating Manual4.17 Crystal Life and Starting FrequencyCrystal life is displayed as a percentage of the monitor cr

4 - 28 IPN 074-183X XTC/C - XTC/2 Operating ManualThis page is intentionally blank.

5 - 1IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 5Calibration and Measurement5.1 Importance of Density, Tooling and Z-ratioThe quartz crystal

5 - 2 IPN 074-183X XTC/C - XTC/2 Operating Manual6 Determine the new density value with the following equation:[1]where:D1 = Initial density settingT

5 - 3IPN 074-183XXTC/C - XTC/2 Operating Manual5.4 Laboratory Determination of Z-ratioA list of Z-values for materials commonly used is available i

5 - 4 IPN 074-183X XTC/C - XTC/2 Operating ManualFor multiple layer deposition (for example, two layers), the Z-value used for the second layer is de

5 - 5IPN 074-183XXTC/C - XTC/2 Operating ManualSimple substitutions lead to the equation that was used with the first “frequency measurement” instru

5 - 6 IPN 074-183X XTC/C - XTC/2 Operating ManualThe monitor crystal design depicted in Figure 5-1 is the result of several significant improvements

5 - 7IPN 074-183XXTC/C - XTC/2 Operating Manualinduced stresses, it is essential to minimize these temperature-induced changes. It is only in this w

TOC - 4 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.6.3 Example of SEMI II Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 8 IPN 074-183X XTC/C - XTC/2 Operating Manualaccumulates cycles from the reference oscillator until m counts are accumulated in the first. Since

5 - 9IPN 074-183XXTC/C - XTC/2 Operating Manualyield theoretically correct results in a time frame that was practical for process control. To achiev

5 - 10 IPN 074-183X XTC/C - XTC/2 Operating ManualFigure 5-5 Crystal Frequency Near Series Resonance PointThe active oscillator circuit is designed

5 - 11IPN 074-183XXTC/C - XTC/2 Operating Manualsuddenly apparently thinner by an amount equivalent to the frequency difference between the fundamen

5 - 12 IPN 074-183X XTC/C - XTC/2 Operating Manualfrequencies slightly higher than resonance it is inductive in nature. This information is useful if

5 - 13IPN 074-183XXTC/C - XTC/2 Operating ManualIn general, it is not possible to characterize all processes exactly; some approximation must be app

5 - 14 IPN 074-183X XTC/C - XTC/2 Operating ManualA controller model used extensively is the PID type, shown in Laplace form in equation [10]. [10]Wh

5 - 15IPN 074-183XXTC/C - XTC/2 Operating ManualThe integral of the absolute value of the error (IAE) has been frequently proposed as an alternate c

5 - 16 IPN 074-183X XTC/C - XTC/2 Operating Manualused. A secondary advantage is that immunity to process noise is increased since the data used for

6 - 1IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 6Adjustments and ProblemsThe only user serviceable adjustment is the LCD contrast (see below)

TOC - 5IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 5Calibration and Measurement5.1 Importance of Density, Tooling and Z-ratio . . . . . . . .

6 - 2 IPN 074-183X XTC/C - XTC/2 Operating Manual6.2.2 Parameter Update ErrorsERR 1 . . . . . Parameter out of range; the value attempted to be ente

6 - 3IPN 074-183XXTC/C - XTC/2 Operating Manual6.3.1 Major Instrument Components, Assemblies and Mating ConnectorsFigure 6-1 Components, Assemblie

6 - 4 IPN 074-183X XTC/C - XTC/2 Operating Manual6.3.2 Troubleshooting the InstrumentTable 6-1 Troubleshooting the InstrumentSYMPTOM CAUSE REMEDY1.

6 - 5IPN 074-183XXTC/C - XTC/2 Operating Manual6. control voltage output does not function properlya. DAC board damaged from applying voltage to the

6 - 6 IPN 074-183X XTC/C - XTC/2 Operating Manual6.3.3 Troubleshooting Transducers/SensorsNOTE: The most useful tool for diagnosing sensor head prob

6 - 7IPN 074-183XXTC/C - XTC/2 Operating Manual2. crystal ceases to oscillate during deposition before it reaches its "normal" lifea. crys

6 - 8 IPN 074-183X XTC/C - XTC/2 Operating Manual5. thermal instability: large changes in thickness reading during source warm-up (usually causes thi

6 - 9IPN 074-183XXTC/C - XTC/2 Operating Manualc. material does not adhere to crystalc. make certain the crystal’s surface is clean; avoid touching

6 - 10 IPN 074-183X XTC/C - XTC/2 Operating Manual6.3.4 Troubleshooting Computer CommunicationsTable 6-3 Troubleshooting Computer CommunicationsSYM

6 - 11IPN 074-183XXTC/C - XTC/2 Operating Manualf. F = cannot change value nowf. the command sent is for a parameter that cannot be changed while th

TOC - 6 IPN 074-183X XTC/C - XTC/2 Operating Manual6.5.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure . . . . . . . . . . . 6-216.5.1.4 Sys

6 - 12 IPN 074-183X XTC/C - XTC/2 Operating Manual6.3.5 Leaf Spring ConcernsSpring conditions should be observed as part of the routine maintenance

6 - 13IPN 074-183XXTC/C - XTC/2 Operating Manual6.4 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all tra

6 - 14 IPN 074-183X XTC/C - XTC/2 Operating ManualFigure 6-3 Standard Crystal Sensor (Exploded)6.4.2 Shuttered and Dual SensorsThere is no differen

6 - 15IPN 074-183XXTC/C - XTC/2 Operating Manual6.4.3 Bakeable SensorFor the Bakeable sensor, the procedure is the same as the regular crystal exce

6 - 16 IPN 074-183X XTC/C - XTC/2 Operating Manual6.4.4 Sputtering SensorObserve the general precautions (section 6.4 on page 6-13) for replacing cr

6 - 17IPN 074-183XXTC/C - XTC/2 Operating Manual6.4.5 Crystal SnatcherTo use the crystal snatcher supplied with the sensor follow the instructions

6 - 18 IPN 074-183X XTC/C - XTC/2 Operating Manual6.5 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2NOTE: 760-601-G1 (obsolete) is not compatib

6 - 19IPN 074-183XXTC/C - XTC/2 Operating Manual6.5.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator t

6 - 20 IPN 074-183X XTC/C - XTC/2 Operating Manual6.5.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 6-8 on page 6-18. Re

6 - 21IPN 074-183XXTC/C - XTC/2 Operating Manual11 Connect the six-inch BNC cable to the Feed-Through and disconnect it from the Crystal Interface U

1 - 1IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 1Introduction and Specifications1.1 Instrument Safety1.1.1 Notes, Cautions, WarningsWhen us

6 - 22 IPN 074-183X XTC/C - XTC/2 Operating Manual5 Connect the In-Vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from t

6 - 23IPN 074-183XXTC/C - XTC/2 Operating Manual6.5.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement syst

6 - 24 IPN 074-183X XTC/C - XTC/2 Operating Manual6.5.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(4.01 cm diameter x 4.55 cm)Temperature

A - 1IPN 074-183XXTC/C - XTC/2 Operating ManualAppendix ATable of Densities and Z-ratiosThe following table represents the content of the instrument

A - 2 IPN 074-183X XTC/C - XTC/2 Operating ManualBaTiO35.999 0.464 Barium Titanate (Tetr)BaTiO36.035 0.412 Barium Titanate (Cubic)Be 1.850 0.543 Bery

A - 3IPN 074-183XXTC/C - XTC/2 Operating ManualCr 7.200 0.305 ChromiumCr2O35.210 *1.000 Chromium (111) OxideCr3C26.680 *1.000 Chromium CarbideCrB 6.

A - 4 IPN 074-183X XTC/C - XTC/2 Operating ManualGe3N25.200 *1.000 Germanium NitrideGeO26.240 *1.000 Germanium OxideGeTe 6.200 *1.000 Germanium Tellu

A - 5IPN 074-183XXTC/C - XTC/2 Operating ManualLu 9.840 *1.000 LutetiumMg 1.740 1.610 MagnesiumMgAl2O43.600 *1.000 Magnesium AluminateMgAl2O68.000 *

A - 6 IPN 074-183X XTC/C - XTC/2 Operating ManualNiCr 8.500 *1.000 NichromeNiCrFe 8.500 *1.000 InconelNiFe 8.700 *1.000 PermalloyNiFeMo 8.900 *1.000

A - 7IPN 074-183XXTC/C - XTC/2 Operating ManualSc2O33.860 *1.000 Scandiurn OxideSe 4.810 0.864 SeleniumSi 2.320 0.712 SiliconSi3N43.440 *1.000 Silic

1 - 2 IPN 074-183X XTC/C - XTC/2 Operating Manual1.1.2 General Safety InformationWARNINGThis product is not for use in a manner not specified by the

A - 8 IPN 074-183X XTC/C - XTC/2 Operating ManualTiB24.500 *1.000 Titanium BorideTiC 4.930 *1.000 Titanium CarbideTiN 5.430 *1.000 Titanium NitrideTi

A - 9IPN 074-183XXTC/C - XTC/2 Operating ManualZnS 4.090 0.775 Zinc SulfideZnSe 5.260 0.722 Zinc SelenideZnTe 6.340 0.770 Zinc TellurideZr 6.490 0.6

A - 10 IPN 074-183X XTC/C - XTC/2 Operating ManualThis page is intentionally blank.

Index - 1IPN 074-183XXTC/C - XTC/2 Operating ManualIndexAactive oscillator 5-9, 5-12alarms 4-9anharmonic 5-5, 5-10application support 1-11applicatio

Index - 2 IPN 074-183X XTC/C - XTC/2 Operating ManualMManual Power 2-34mass sensitivity 5-4measured deposition rate 5-14Measurement And Control Loop

Index - 3IPN 074-183XXTC/C - XTC/2 Operating ManualZzero displayed thickness 2-10Z-Match equation 5-8Z-Match technique 5-8Z-Ratio 5-1, A-1

Index - 4 IPN 074-183X XTC/C - XTC/2 Operating ManualThis page is intentionally blank.

1 - 3IPN 074-183XXTC/C - XTC/2 Operating Manual1.1.3 Earth GroundThis instrument is connected to earth via a sealed three-core (three-conductor) po

1 - 4 IPN 074-183X XTC/C - XTC/2 Operating Manual1.1.4 Main Power ConnectionWARNINGThis instrument has line voltage present on the primary circuits

1 - 5IPN 074-183XXTC/C - XTC/2 Operating Manual1.2 Introduction to the InstrumentThe XTC/2 and XTC/C are quartz crystal transducer type deposition

1 - 6 IPN 074-183X XTC/C - XTC/2 Operating Manual1.3 SpecificationsAt the time of this manual’s writing, the specifications for performance are as p

1 - 7IPN 074-183XXTC/C - XTC/2 Operating Manual1.3.1.4 Input/OutputInputs . . . . . . . . . . . . . . . . . . . . . . 9 TTL inputsOutputsa) relay .

1 - 8 IPN 074-183X XTC/C - XTC/2 Operating Manual1.3.1.8 Hardware interfaceSensorsSingle. . . . . . . . . . . . . . . . . . . .2Dual . . . . . . . .

1 - 9IPN 074-183XXTC/C - XTC/2 Operating Manual1.3.2 Transducer Specifications (optional)1.3.3 XIU (Crystal Interface Unit) SpecificationsThe XTC/

1 - 10 IPN 074-183X XTC/C - XTC/2 Operating Manual1.4 Guide to the Use of the ManualThis manual is configured to be used by both experienced and ine

1 - 11IPN 074-183XXTC/C - XTC/2 Operating Manual1.6 Related ManualsTransducers are covered under separate manuals.IPN Transducer Type074-154 . . .

1 - 12 IPN 074-183X XTC/C - XTC/2 Operating Manual1.7.2 Field Service and Repair SupportAustin, TX . . . . . . ph. 512-448-0488. . . . . . . . . .fa

2 - 1IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 2Quick Use Guide2.1 Unpacking, Initial Inspection and Inventory2.1.1 Unpacking and Inspecti

OPERATING MANUALXTC/C XTC/2Thin Film Deposition ControllerTWO TECHNOLOGY PLACEEAST SYRACUSE, NY 13057-9714 USAPhone: +315.434.1100Fax: +315.437.3803E

2 - 2 IPN 074-183X XTC/C - XTC/2 Operating Manual2.1.2.1 XTC/2 System ConfigurationBASIC CONFIGURATION IPN # CODE#115V 50/60 Hz 757-500-G1 1230V 50/

2 - 3IPN 074-183XXTC/C - XTC/2 Operating Manual2.1.2.3 Ship Kit - XTC/2 XTC/CBoth instruments are shipped with the following accessories. To find w

2 - 4 IPN 074-183X XTC/C - XTC/2 Operating Manual2.2 Voltage SelectionVoltage selection is required only between low (nominal 100-120 V) and high (n

2 - 5IPN 074-183XXTC/C - XTC/2 Operating ManualTo inspect the fuse, proceed as follows.1 Pry open the power entry module cover. See Figure 2-1.Figur

2 - 6 IPN 074-183X XTC/C - XTC/2 Operating Manual3 Inspect the fuse. See Figure 2-3.Figure 2-3 Clip, Fuse Holder, FuseThe Corcom fuse holder has cha

2 - 7IPN 074-183XXTC/C - XTC/2 Operating ManualFigure 2-4 Proper Clip and Fuse LocationOnce the fuse and clip have been configured, the fuse holder

2 - 8 IPN 074-183X XTC/C - XTC/2 Operating Manual2.3 Installation Guide and SchematicMany experienced deposition monitor users will be able to fully

2 - 9IPN 074-183XXTC/C - XTC/2 Operating ManualFigure 2-5 Installation Guide SchematicSource ControllerSuch As ElectronBeam GunPower SupplyXIU (Osc

2 - 10 IPN 074-183X XTC/C - XTC/2 Operating Manual2.4 XTC/2 Front Panel DescriptionThe description of the XTC/2 front panel is divided into two sect

2 - 11IPN 074-183XXTC/C - XTC/2 Operating Manual9— ON/STBYSwitches secondary power of the instrument between ON and STANDBY.10—Green LED indicates t

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.INFICON®, CrystalSix® are trademarks of

2 - 12 IPN 074-183X XTC/C - XTC/2 Operating Manual2.4.2 XTC/2 Display DescriptionFigure 2-7 XTC/2 Display 1— RATE DISPLAY GROUPIndicates the deposi

2 - 13IPN 074-183XXTC/C - XTC/2 Operating Manual6— RATE DEVIATION GROUPA graphic annunciator that displays the current deviation of the deposition r

2 - 14 IPN 074-183X XTC/C - XTC/2 Operating Manual9— POWER and PROCESS GROUPIndicates the relative source power when the display is in the Operate mo

2 - 15IPN 074-183XXTC/C - XTC/2 Operating Manual15— CRYSTAL FAIL SUBGROUPAnnunciators and cursors used when the display is in the program mode to de

2 - 16 IPN 074-183X XTC/C - XTC/2 Operating Manual20— PROGRAMMING and PHASE INDICATOR GROUPAnnunciators and cursors for navigating, displaying and ch

2 - 17IPN 074-183XXTC/C - XTC/2 Operating Manual8— MANUALWhen the associated LED is illuminated the instrument is capable of responding to power cha

2 - 18 IPN 074-183X XTC/C - XTC/2 Operating Manual2.6 Rear Panel DescriptionThe rear panel provides the interface for all external connections to th

2 - 19IPN 074-183XXTC/C - XTC/2 Operating Manual2.6.2 Configuration Switches 1 & 2Two eight position DIP switches used to customize the instrum

2 - 20 IPN 074-183X XTC/C - XTC/2 Operating ManualTable 2-2 Configuration Switch SettingsXTC/2 XTC/CSwitch 1 Test Mode (0 = off, 1 = on) Communicati

2 - 21IPN 074-183XXTC/C - XTC/2 Operating ManualSwitch 12 Input Option0 = standard1 = film selectUnusedSwitch 13 Relay Option1 = onRelay 7 = End of

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. 2 Technology P

2 - 22 IPN 074-183X XTC/C - XTC/2 Operating Manual2.6.3 Grounding StudRecommended point for connecting the system ground strap. For specific recomme

2 - 23IPN 074-183XXTC/C - XTC/2 Operating Manual2.6.4 System I/OA 25-pin male "D" type connector for interface connection. (See Figure 2-

2 - 24 IPN 074-183X XTC/C - XTC/2 Operating Manual2.6.5 AUX I/OA 25-pin male "D" type connector for interface connection, see Figure 2-14

2 - 25IPN 074-183XXTC/C - XTC/2 Operating Manual2.6.6 Sensor 1, Sensor 2High density 15-pin female "D" type. Input connectors for intelli

2 - 26 IPN 074-183X XTC/C - XTC/2 Operating Manual2.6.7 RS232A 9-pin female "D" type connector which enables the instrument to be controll

2 - 27IPN 074-183XXTC/C - XTC/2 Operating Manual2.6.8 Communication OptionLocation of optional computer interface. Figure 2-17 IEEE488 Option2.6.

2 - 28 IPN 074-183X XTC/C - XTC/2 Operating Manual2.6.10 Manufacturer’s Identification and Serial Number PlateThis plate is installed at final assem

2 - 29IPN 074-183XXTC/C - XTC/2 Operating Manual2.7 Operation as a Deposition MonitorAlthough this instrument is designed as a multi-layer process

2 - 30 IPN 074-183X XTC/C - XTC/2 Operating Manual2.7.2 Monitoring - Systems with a Source ShutterIn addition to measuring rate and thickness, these

2 - 31IPN 074-183XXTC/C - XTC/2 Operating Manual2.7.3 Rate SamplingIt is possible to use these instruments to periodically sample the rate in a dep

2 - 32 IPN 074-183X XTC/C - XTC/2 Operating Manual2.7.4 Nontraditional ApplicationsIn addition to their normal application as a deposition monitor/c

2 - 33IPN 074-183XXTC/C - XTC/2 Operating Manual2.7.4.4 Measurement of LiquidsThe measurement of the mass of a liquid on the face of a crystal is a

2 - 34 IPN 074-183X XTC/C - XTC/2 Operating ManualFor example, if the first layer of the process is 1000Å of copper it would be convenient to dedicat

2 - 35IPN 074-183XXTC/C - XTC/2 Operating Manualsecond to 4% per second over 4 seconds and then held at a constant 4% per second. This feature is de

2 - 36 IPN 074-183X XTC/C - XTC/2 Operating Manual2.9 Operation as a Multi-Layer ControllerThis instrument can be programmed to execute a series of

3 - 1IPN 074-183XXTC/C - XTC/2 Operating ManualChapter 3Installation3.1 Installing the Instrument - DetailsA general schematic of instrument instal

3 - 2 IPN 074-183X XTC/C - XTC/2 Operating Manual3.2.1 Verifying / Establishing Earth GroundIf local facilities engineering cannot provide a low imp

3 - 3IPN 074-183XXTC/C - XTC/2 Operating ManualCAUTIONAn external ground connection is required to ensure proper operation, especially in electrical

3 - 4 IPN 074-183X XTC/C - XTC/2 Operating Manual3.3 Connection to Rear PanelThe long term performance of this instrumentation is dependent on the q

3 - 5IPN 074-183XXTC/C - XTC/2 Operating Manual5 Coat the stripped portion of the wire(s) with the flux and insert into the solder cup of the contac

Registration CardTWO TECHNOLOGY PLACEEAST SYRACUSE, NY 13057-9714 USAPhone: +315.434.1100Fax: +315.437.3803Email: [email protected] LANDSTRASSE

3 - 6 IPN 074-183X XTC/C - XTC/2 Operating Manual3.4 Sensor Selection GuideThe choice of sensor type must be dictated by the process, the deposition

3 - 7IPN 074-183XXTC/C - XTC/2 Operating Manual3.5 Guidelines for Transducer InstallationCAUTIONThe performance of this instrument depends on the c

3 - 8 IPN 074-183X XTC/C - XTC/2 Operating ManualFigure 3-3 Typical InstallationMounting BracketCoax Cable(Routed withWater Tubes)Or,Customer Suppli

3 - 9IPN 074-183XXTC/C - XTC/2 Operating ManualGenerally, install the sensor as far as possible from the evaporation source (a minimum of 10" o

3 - 10 IPN 074-183X XTC/C - XTC/2 Operating Manual3.5.2 CrystalSixInstalling the CrystalSix transducer requires that the CrystalSwitch configuration

3 - 11IPN 074-183XXTC/C - XTC/2 Operating Manual3.5.3 Check List for Transducer Installation Mount the sensor to something rigid and fixed in the

3 - 12 IPN 074-183X XTC/C - XTC/2 Operating Manual3.6.1 Operational TestThe power switch should be in the STBY position before the instrument is con

3 - 13IPN 074-183XXTC/C - XTC/2 Operating Manual6 Refer to the list of parameters in Table 3-2 and enter the data as they are given.7 When the corre

3 - 14 IPN 074-183X XTC/C - XTC/2 Operating Manual10 RISE TIME 1 will be displayed, the min:sec counter begins to decrement from 00:20, while POWER i

3 - 15IPN 074-183XXTC/C - XTC/2 Operating Manual3.7 Input and Output Details3.7.1 RelaysWARNINGThe relay, relay circuit, and associated pins in th

BUSINESS REPLY MAILFIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORKPOSTAGE WILL BE PAID BY ADDRESSEEINFICON INC.Two Technology PlaceEast Syracuse, Ne

3 - 16 IPN 074-183X XTC/C - XTC/2 Operating Manual59,10Stop When a stop condition is generated, see section 4.3.2 on page 4-9, section 4.3.1 on page

3 - 17IPN 074-183XXTC/C - XTC/2 Operating Manual12 11,12 END Deposit When FINAL THK is exceeded for two consecutive measurementsEntry of READY state

3 - 18 IPN 074-183X XTC/C - XTC/2 Operating Manual3.7.2 InputsInputs are activated by pulling the specific input's terminal to ground (<0.8V

3 - 19IPN 074-183XXTC/C - XTC/2 Operating Manual3.7.3 Chart RecorderThe chart recorder output has 12 bit resolution with one additional bit of sign

3 - 20 IPN 074-183X XTC/C - XTC/2 Operating Manual3.7.4 Source OutputsThe source outputs will drive +/- 10.00 volts into a 400 ohm load. The output

3 - 21IPN 074-183XXTC/C - XTC/2 Operating ManualNOTE: Do not turn the unit off while in the Communications Program Mode, otherwise the new parameter

3 - 22 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.2 Basic Command StructureThe following commands are available via the computer communications:

3 - 23IPN 074-183XXTC/C - XTC/2 Operating ManualIEEE488 FORMAT (Message Protocol)To XTC: message_string LF d10 (CHR$ 10)From XTC: message_string LF

3 - 24 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.3 Service Requests and Message AvailableIn the IEEE mode there are a number of events which wi

3 - 25IPN 074-183XXTC/C - XTC/2 Operating Manual3.8.4 DataloggingThe DATALOG data output represents the information concerning the latest "shu

WarrantyTWO TECHNOLOGY PLACEEAST SYRACUSE, NY 13057-9714 USAPhone: +315.434.1100Fax: +315.437.3803Email: [email protected] LANDSTRASSE 6LI-9496

3 - 26 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.5 Computer Command Details3.8.5.1 Echo CommandEchoes the message, i.e., returns the sent mess

3 - 27IPN 074-183XXTC/C - XTC/2 Operating ManualTable 3-8 Parameter Definition Table (for Query and Update Commands)PP XTC/2 Parameter Range0 Rise

3 - 28 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.5.4 Update CommandThe Update command replaces the current parameter value with the DATA Sent.T

3 - 29IPN 074-183XXTC/C - XTC/2 Operating ManualS4. . . . . . Phase currently in process. xS4 Response Codes0 . . . . . . .Ready phase1 . . . . . .

3 - 30 IPN 074-183X XTC/C - XTC/2 Operating ManualS11 . . . . Output status - returns a string of 16 ASCII bytes, 1 per output. Each byte has an AS

3 - 31IPN 074-183XXTC/C - XTC/2 Operating ManualS13. . . . . Raw frequency - Frequency of crystal being read. xxxxxxx.x Hz[negative of last good fre

3 - 32 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.5.6 Remote CommandThe format of the remote command is:R xx vvvwhere:R . . . . . . Is the lit

3 - 33IPN 074-183XXTC/C - XTC/2 Operating ManualR21. . . . . Trigger beeperR22. . . . . Clear Error FlagR23. . . . . Set 250ms DATA Ready Service re

3 - 34 IPN 074-183X XTC/C - XTC/2 Operating Manual3.8.6 Examples of RS232 Programs3.8.6.1 Program Without Checksum10 ’----XTC/2 RS232 COMMUNICATION

3 - 35IPN 074-183XXTC/C - XTC/2 Operating Manual3.8.6.2 Program With Checksum10 ’--XTC/2 RS232 COMMUNICATIONS PROGRAM WITH CHECKSUM USING THE INFIC