Inficon XTC/3 Thin Film Deposition Controller Operating Ma Manuel d'utilisateur

OPERATING MANUALXTC/3Thin Film Deposition ControllerPN 074-446-P1JCover Page

TOC - 2 PN 074-446-P1JXTC/3 Operating Manual1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-

4 - 20PN 074-446-P1JXTC/3 Operating ManualAUTOSTART NEXT LAYER Yes / No (XTC/3M only)Press the TOGL key to move through the choices. Default is No. Y

4 - 21PN 074-446-P1JXTC/3 Operating Manual LOCK CODE . . . . . . . . . 1 to 9999The L Lock lock code is set by moving to the Lock Code XXXX and enteri

4 - 22PN 074-446-P1JXTC/3 Operating ManualRECORDER MODE. . . . Rate, Thickness, Power, Rate Deviation.Press the TOGL key to move through the choices.

4 - 23PN 074-446-P1JXTC/3 Operating Manual 4.4.2.1 XTC/3S Film Select OptionFigure 4-16 XTC/3S Film SelectINPUT OPTION . . . . . . . . . . . . . . .

4 - 24PN 074-446-P1JXTC/3 Operating Manual4.4.3 Comm Info Figure 4-17 Comm Info Screen with TCP/IP Option installedNOTE: IP address and net mask are

4 - 25PN 074-446-P1JXTC/3 Operating Manual 4.4.3.1 Remote Communication Parameters RS-232BAUD RATE. . . . . . . . . . . . . . . . . . . 9600, 19200,

4 - 26PN 074-446-P1JXTC/3 Operating Manual4.5 I/O OverviewFigure 4-18 XTC3/M Main Menu screenThe I/O Map display appears after pressing the MENU key

4 - 27PN 074-446-P1JXTC/3 Operating Manual 4.5.1 XTC/3S Inputs and OutputsIn XTC/3S, the fixed I/O will be displayed on the I/O Map screen. The assig

4 - 28PN 074-446-P1JXTC/3 Operating Manual4.5.2 XTC/3M InputsFigure 4-22 Inputs screen 1 (XTC/3M only)Figure 4-23 Inputs screen 2 (XTC/3M only)In X

4 - 29PN 074-446-P1JXTC/3 Operating Manual 4.5.3 XTC/3M Outputs The Relay Outputs and TTL Outputs screens allow modification of the 12 relays or the

TOC - 3PN 074-446-P1JXTC/3 Operating Manual 3.3.2 Operate Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4 - 30PN 074-446-P1JXTC/3 Operating ManualFigure 4-25 Relay Outputs 2Figure 4-26 Relay Outputs 3Figure 4-27 Relay Outputs 4

4 - 31PN 074-446-P1JXTC/3 Operating Manual Figure 4-28 TTL OutputsNOTE: Three additional selection screens, identical to those for the Relay outputs,

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5 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 5Remote Communications5.1 Remote Communications OverviewXTC/3 may be remotely controlled, programme

5 - 2PN 074-446-P1JXTC/3 Operating Manual5.1.2 Physical ConnectionsTwo types of data communications hardware ports are available. Standard equipment

5 - 3PN 074-446-P1JXTC/3 Operating Manual 5.1.4.2 How to Set Up the Network Protocol on the PCMost personal computers are configured to obtain the IP

5 - 4PN 074-446-P1JXTC/3 Operating ManualFigure 5-2 Local Area Connection PropertiesOn the General tab, select Internet Protocol (TCP/IP) and press t

5 - 5PN 074-446-P1JXTC/3 Operating Manual Select the button for Use the following IP address, enter the IP address: and Subnet mask: shown in Figure 5

5 - 6PN 074-446-P1JXTC/3 Operating Manual5.2 Standard Protocol Message FormatThis message format is in effect if Standard has been selected under the

5 - 7PN 074-446-P1JXTC/3 Operating Manual Command Sub-group = 1 ASCII byte, used with some command groups to further specify commands. For command Q a

TOC - 4 PN 074-446-P1JXTC/3 Operating ManualChapter 4XTC/3 Programming4.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 8PN 074-446-P1JXTC/3 Operating Manual5.2.1.2 Standard Response Packet (XTC/3 to Host Message)<Length><CCB><Timer><Response M

5 - 9PN 074-446-P1JXTC/3 Operating Manual Response Error Code = 1 byte ASCIIA= Illegal CommandB = Illegal parameter valueC = Illegal IDD = Illegal for

5 - 10PN 074-446-P1JXTC/3 Operating Manual5.2.2 Standard Communication CommandsNOTE: The following only include the “command” portion of the command

5 - 11PN 074-446-P1JXTC/3 Operating Manual 5.2.2.3 Standard QUERY Commands5.2.2.3.1 Query BlockCommand:QB<Command ID>Command ID = See listing

5 - 12PN 074-446-P1JXTC/3 Operating ManualResponse:<Number of Bytes in Response><General Parameters><Film 1 Parameters>…<Film32 P

5 - 13PN 074-446-P1JXTC/3 Operating Manual 5.2.2.3.2 Standard Query Film Name (XTC3/M only)Command:QN <Film Number>Film Number = <Byte> 1

5 - 14PN 074-446-P1JXTC/3 Operating Manual5.2.2.3.5 Standard Query Input Definition (XTC/3M Only)Command:QI <Input Number>Input Number = <By

5 - 15PN 074-446-P1JXTC/3 Operating Manual 22 (Select Process 1-64, 6 bits, bit 5)23 (Select Process 1-64, 6 bits, bit 6)24 Select Process 1-99, 7 bit

5 - 16PN 074-446-P1JXTC/3 Operating Manual2 Source Shutter 23 Sensor Shutter 14 Sensor Shutter 25 Stop6 End of Process7 Thickness Setpoint8 Crystal Fa

5 - 17PN 074-446-P1JXTC/3 Operating Manual 33 Crystal Switching34 Crucible Switcher Fail35 Shutter Delay Error36 Computer Control37 Crucible Select So

TOC - 5PN 074-446-P1JXTC/3 Operating Manual 5.1.4 TCP/IP Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5 - 18PN 074-446-P1JXTC/3 Operating Manual5.2.2.3.7 Standard Query Output Type Definition (XTC/3M Only)Command:QT <Output Number>Output Number

5 - 19PN 074-446-P1JXTC/3 Operating Manual Command ID = 3 "Specific Layer"<Parameter> = <2 Bytes>Desired LayerResponse:<Byte&

5 - 20PN 074-446-P1JXTC/3 Operating ManualAll General parameters (4 bytes per parameter)All parameters for each film (4 bytes per parameter) (9 or 32

5 - 21PN 074-446-P1JXTC/3 Operating Manual 5.2.2.4.3 Standard Update Film ParametersCommand:UF <Command ID> <Film Number> <Parameter V

5 - 22PN 074-446-P1JXTC/3 Operating ManualTable 5-2 Standard film parametersUF(0x5546)Command IDName Units / Allowed Values / NotesData Type / Format

5 - 23PN 074-446-P1JXTC/3 Operating Manual 14(0x0e)RW Hold Time MM:SS(Seconds)Int 0 99:59(5999)15(0x0f)Sensor Cannot change if film is runningInt 1 21

5 - 24PN 074-446-P1JXTC/3 Operating Manual29(0x1d)Z-Ratio Floatx.xxxxx.xxxxx.x0.100 9.99930(0x1e)Time Power 1=Yes, 0 = NoInt 0 131(0x1f)Delay option 0

5 - 25PN 074-446-P1JXTC/3 Operating Manual 5.2.2.4.4 Standard Update General ParametersCommand:UG <Command ID> <Parameter Value> Command

5 - 26PN 074-446-P1JXTC/3 Operating Manual6(0x06)1Sensor 1 Type 0 = Single1 = CrystalTwo2 = CrystalSix3 = Crystal124 = Rotary5 = Dual HeadInt 0 57(0x0

5 - 27PN 074-446-P1JXTC/3 Operating Manual 5.2.2.4.5 Standard Update Input Definition (XTC/3M only)Command:UI <Input Number> <Input Definiti

TOC - 6 PN 074-446-P1JXTC/3 Operating Manual5.3.5.4 XTC/2 UPDATE Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41

5 - 28PN 074-446-P1JXTC/3 Operating Manual5.2.2.4.7 Standard Update Output Type Definition (XTC/3M Only)Command:UT <Output Number> < Output

5 - 29PN 074-446-P1JXTC/3 Operating Manual 5.2.2.5 Standard STATUS CommandsCommand:S <Command ID> (<Action Value>) - see special case S0

5 - 30PN 074-446-P1JXTC/3 Operating ManualTable 5-4 Standard Status commandsS(0x53) Command IDDescription Response:Description (Data Format) Units -D

5 - 31PN 074-446-P1JXTC/3 Operating Manual 4(0x04)Current State (Byte) - Decoded as follows: -0 = Ready1 = Crucible Switch2 = Rise 13 = Soak 14 = Rise

5 - 32PN 074-446-P1JXTC/3 Operating Manual14(0x0e)Xtal Fail (Byte) 0 = good crystal / not in Xtal Fail;1 = failed crystal / in Xtal Fail15(0x0f)Max Po

5 - 33PN 074-446-P1JXTC/3 Operating Manual 31(0x1f)Rolling Average (Float) Å/Sec Returns a rolling 6.25-second average of the measurement rate. Update

5 - 34PN 074-446-P1JXTC/3 Operating Manual5.2.2.6 Standard REMOTE CommandsR <Command ID> (<Action Value>) Command ID = <Byte>. See

5 - 35PN 074-446-P1JXTC/3 Operating Manual 13(0x0d)Final thickness trigger Causes the active film to react as if the final thickness was reached.14(0x

5 - 36PN 074-446-P1JXTC/3 Operating Manual5.3 XTC/2 Protocols One of these protocols is in effect if XTC/2 Ck Sum, XTC/2 No Ck Sum, XTC/C Ck Sum or X

5 - 37PN 074-446-P1JXTC/3 Operating Manual 5.3.2 XTC/2 Serial Communication with ChecksumThis portion of the protocol is in effect in addition to the

TOC - 7PN 074-446-P1JXTC/3 Operating Manual Chapter 7Calibration Procedures7.1 Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . .

5 - 38PN 074-446-P1JXTC/3 Operating Manual5.3.4 XTC/2 Error CodesTable 5-6 XTC/2 error codesCode DescriptionA Illegal commandB Illegal ValueC Illega

5 - 39PN 074-446-P1JXTC/3 Operating Manual 5.3.5 XTC/2 Message Strings5.3.5.1 XTC/2 ECHO CommandEchoes the message, i.e., returns the sent message.T

5 - 40PN 074-446-P1JXTC/3 Operating Manual12 Xtal Switch S 0 - 9 (See XTC/2 manual section 4.6)13 Xtal Switch Q 0 - 9 (See XTC/2 manual section 4.6

5 - 41PN 074-446-P1JXTC/3 Operating Manual 5.3.5.4 XTC/2 UPDATE CommandThe Update command replaces the current parameter value with the DATA Sent.To

5 - 42PN 074-446-P1JXTC/3 Operating ManualNOTE: In XTC/2 one can program a zero film number in layer two and a good film number in layer three. This i

5 - 43PN 074-446-P1JXTC/3 Operating Manual S6 . . . . . . Active layer. xS7 . . . . . . Active film xS8 . . . . . . Active sensor. xS9 . . . . . . Cry

5 - 44PN 074-446-P1JXTC/3 Operating ManualS12. . . . . Input status - returns 9 ASCII bytes in order byte 1 to 9, 1 byte per input. Each byte has an A

5 - 45PN 074-446-P1JXTC/3 Operating Manual 1 = Selection active, 0 = default state for selectionAlso see S22 below.NOTE: In the default configuration,

5 - 46PN 074-446-P1JXTC/3 Operating ManualS21. . . . . Error Flag - If more than one error code exists, the response string will return them all, each

5 - 47PN 074-446-P1JXTC/3 Operating Manual R12. . . . . Zero thickness. Simulates remote input or front panel ZERO keystroke.R13. . . . . Final thickn

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5 - 48PN 074-446-P1JXTC/3 Operating ManualR38 x . . . Recorder Type x (0 = Rate 0 to 100 Å/s,1 = Rate 0 to 1000 Å/s,2 = Thickness 0 to 100 Å,3 = Thic

5 - 49PN 074-446-P1JXTC/3 Operating Manual 220 IF I$ = NAK$ THEN RETURN :’ CHARACTER IS RECEIVEDGOTO PRINT RESPONSE.230 RESPONSE$ = RESPONSE$ + I$ :’-

5 - 50PN 074-446-P1JXTC/3 Operating Manual280 ’290 PRINT #1, STX$ + SIZEM$ + SIZEL$ + CMD$ + CHECKSUM$300 ’310 ’----RECEIVE RESPONSE MESSAGE FROM XTC/

6 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 6Troubleshooting, Status and Error Messages6.1 Status and Error MessagesALREADY RUNNINGThis message

6 - 2PN 074-446-P1JXTC/3 Operating ManualDIGITAL INPUTUnit has gone into STOP because the designated Stop Input was activated.EMPTY PROCESSIndicates t

6 - 3PN 074-446-P1JXTC/3 Operating Manual NO MANUAL XTAL FAILUnable to enter Manual operation.NO MANUAL IN STOPUnable to enter Manual operation.NO MAN

6 - 4PN 074-446-P1JXTC/3 Operating ManualR LOCKIndicates XTC/3 is in a Remote Program Lock mode. This prohibits any parameter from being entered from

6 - 5PN 074-446-P1JXTC/3 Operating Manual TESTING XIUXIU test in progress.TIME POWERIndicates XTC/3 entered the Time Power mode due to a crystal failu

6 - 6PN 074-446-P1JXTC/3 Operating Manual6.2 XTC/3 DiagnosticsThe initial page shows the revision level of the firmware as well as serial numbers. Fi

6 - 7PN 074-446-P1JXTC/3 Operating Manual Output Set or ClearTo verify operation of outputs, cursor to the desired output and press the TOGL key. The

1 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 1Introduction and Specifications1.1 IntroductionXTC/3 is produced in two versions: XTC/3M Multi-La

6 - 8PN 074-446-P1JXTC/3 Operating Manual6.3 Troubleshooting GuideIf XTC/3 fails to work, or appears to have diminished performance, the following Sy

6 - 9PN 074-446-P1JXTC/3 Operating Manual 6.3.1 Troubleshooting XTC/3Table 6-1 Troubleshooting XTC/3SYMPTOM CAUSE REMEDY1. power on LED not illumina

6 - 10PN 074-446-P1JXTC/3 Operating Manual7. LCD display blank a. LCD or CRT/power supply problema. contact INFICONb. LCD Dimmer Time has elapsed.b. p

6 - 11PN 074-446-P1JXTC/3 Operating Manual 6.3.2 Troubleshooting Transducers/SensorsMany sensor head problems may be diagnosed with a DVM (Digital Vo

6 - 12PN 074-446-P1JXTC/3 Operating Manual.Table 6-2 Troubleshooting transducers/sensorsSYMPTOM CAUSE REMEDY1. large jumps of thickness reading durin

6 - 13PN 074-446-P1JXTC/3 Operating Manual 3. crystal does not oscillate or oscillates intermittently (both in vacuum and in air) a. intermittent or p

6 - 14PN 074-446-P1JXTC/3 Operating Manual5. thermal instability: large changes in thickness reading during source warm-up (usually causes thickness r

6 - 15PN 074-446-P1JXTC/3 Operating Manual 6. poor thickness reproducibilitya. variable source flux distributiona. move sensor to a more central locat

6 - 16PN 074-446-P1JXTC/3 Operating Manual8. CrystalSix and Crystal12: crystal switch problem (does not advance or not centered in aperture)a. loss of

6 - 17PN 074-446-P1JXTC/3 Operating Manual 6.3.3 Troubleshooting Computer Communications6.3.3.1 TCP/IP Module LED DiagnosticsTable 6-3 Troubleshoot

1 - 2PN 074-446-P1JXTC/3 Operating Manual1.1.1 Related ManualsSensors are covered in separate manuals. PDF files of these manuals are contained in th

6 - 18PN 074-446-P1JXTC/3 Operating Manual6.4 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all transducers

6 - 19PN 074-446-P1JXTC/3 Operating Manual Figure 6-3 Front load single sensor (exploded)6.4.2 Shuttered Front Load Single and Front Load Dual Senso

6 - 20PN 074-446-P1JXTC/3 Operating Manual2 Hold the drawer by the handle and turn it upside down to remove the spent crystal.3 Install a new crystal

6 - 21PN 074-446-P1JXTC/3 Operating Manual 6.4.4 Bakeable SensorFor the Bakeable sensor, the procedure is the same as the Front Load Single sensor ex

6 - 22PN 074-446-P1JXTC/3 Operating Manual6.4.5 Sputtering SensorObserve the general precautions for replacing crystals and follow the instructions b

6 - 23PN 074-446-P1JXTC/3 Operating Manual 6.4.6 Crystal SnatcherUse the crystal snatcher, supplied with the sensor (excluding Cool Drawer sensors),

6 - 24PN 074-446-P1JXTC/3 Operating Manual6.5 Crystal Sensor Emulator PN 760-601-G2NOTE: 760-601-G2 is fully compatible with all INFICON thin film de

6 - 25PN 074-446-P1JXTC/3 Operating Manual 6.5.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator to analy

6 - 26PN 074-446-P1JXTC/3 Operating Manual6.5.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 6-10 on page 6-24. Remove the

6 - 27PN 074-446-P1JXTC/3 Operating Manual 11 Connect the 6 in. BNC cable to the Feed-Through and disconnect it from the Crystal Interface Unit (or Os

1 - 3PN 074-446-P1JXTC/3 Operating Manual 1.2.2 General Safety InformationWARNING - Risk Of Electric ShockDo not open the XTC/3 case! There are no us

6 - 28PN 074-446-P1JXTC/3 Operating Manual5 Connect the In-Vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 Ω) from the finger s

6 - 29PN 074-446-P1JXTC/3 Operating Manual 6.5.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement system for

6 - 30PN 074-446-P1JXTC/3 Operating Manual6.5.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Temperature Range0

7 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 7Calibration Procedures7.1 Importance of Density, Tooling and Z-RatioThe quartz crystal microbalanc

7 - 2PN 074-446-P1JXTC/3 Operating Manual6 Determine the new density value with the following equation:[1]where:D1 = Initial density settingTx = Thick

7 - 3PN 074-446-P1JXTC/3 Operating Manual 7.4 Laboratory Determination of Z-RatioA list of Z-values for materials commonly used is available in the M

7 - 4PN 074-446-P1JXTC/3 Operating Manualof thickness is greater than the actual thickness, increase the Z-Ratio value. If the calculated value of thi

8 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 8Measurement and Control Theory8.1 BasicsThe Quartz Crystal deposition monitor, or QCM, utilizes th

8 - 2PN 074-446-P1JXTC/3 Operating Manualwhen 1 angstrom of Aluminum (density of 2.77 g/cm3) is added to its surface. In this manner the thickness of

8 - 3PN 074-446-P1JXTC/3 Operating Manual Contouring dissipates the energy of the traveling acoustic wave before it reaches the edge of the crystal. E

1 - 4PN 074-446-P1JXTC/3 Operating Manual1.2.3 Earth GroundXTC/3 is connected to earth ground through a sealed three-core (three-conductor) power cab

8 - 4PN 074-446-P1JXTC/3 Operating ManualFigure 8-3 Thickness shear displacement8.1.2 Period Measurement TechniqueAlthough instruments using equatio

8 - 5PN 074-446-P1JXTC/3 Operating Manual Since the frequency of the reference is stable and known, the time to accumulate the m counts is known to an

8 - 6PN 074-446-P1JXTC/3 Operating ManualTo achieve this new level of accuracy requires only that the user enter an additional material parameter, Z,

8 - 7PN 074-446-P1JXTC/3 Operating Manual into a greater frequency shift than that which would be produced with a new crystal. In the extreme, the bas

8 - 8PN 074-446-P1JXTC/3 Operating Manualuses the phase/frequency properties of the quartz crystal to determine the resonant frequency. It operates by

8 - 9PN 074-446-P1JXTC/3 Operating Manual 8.1.6 Control Loop TheoryThe instrumental advances in measurement speed, precision and reliability would no

8 - 10PN 074-446-P1JXTC/3 Operating ManualThree parameters are determined from the process reaction curve. They are the steady state gain, Kp, the dea

8 - 11PN 074-446-P1JXTC/3 Operating Manual R(s) represents the rate setpoint. The feedback mechanism is the error generated by the difference between

8 - 12PN 074-446-P1JXTC/3 Operating ManualITAE is insensitive to the initial and somewhat unavoidable errors, but it will weight heavily any errors oc

A - 1PN 074-446-P1JXTC/3 Operating Manual Chapter AMaterial TableCAUTIONSome of these materials are toxic. Please consult the material safety data s

1 - 5PN 074-446-P1JXTC/3 Operating Manual 1.3 How to Contact INFICONWorldwide customer support information is available under Support >> Suppor

A - 2 PN 074-446-P1JXTC/3 Operating ManualBeF21.990 *1.000 beryllium fluorideBeO 3.010 *1.000 beryllium oxideBi 9.800 0.790 bismuthBi2O38.900 *1.000

A - 3PN 074-446-P1JXTC/3 Operating Manual CsCI 3.988 1.399 cesium chlorideCsI 4.516 1.542 cesium iodideCu 8.930 0.437 copperCu2O 6.000 *1.000 copper

A - 4 PN 074-446-P1JXTC/3 Operating ManualHo 8.800 0.580 holmiumHo2O38.410 *1.000 holmium oxideIn 7.300 0.841 indiumIn2O37.180 *1.000 indium sesquiox

A - 5PN 074-446-P1JXTC/3 Operating Manual MoS24.800 *1.000 molybdenum disulfideNa 0.970 4.800 sodiumNa3AIF62.900 *1.000 cryoliteNa5Al3F142.900 *1.00

A - 6 PN 074-446-P1JXTC/3 Operating ManualPr 6.780 *1.000 praseodymiumPr2O36.880 *1.000 praseodymium oxidePt 21.400 0.245 platinumPtO210.200 *1.000 p

A - 7PN 074-446-P1JXTC/3 Operating Manual TaN 16.300 *1.000 tantalum nitrideTb 8.270 0.660 terbiumTc 11.500 *1.000 technetiumTe 6.250 0.900 telluriu

A - 8 PN 074-446-P1JXTC/3 Operating ManualY 4.340 0.835 yttriumY2035.010 *1.000 yttrium oxideYb 6.980 1.130 ytterbiumYb2O39.170 *1.000 ytterbium oxid

1 - 6PN 074-446-P1JXTC/3 Operating Manual1.4 XTC/3 Specifications1.4.1 MeasurementMeasurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)Frequency

1 - 7PN 074-446-P1JXTC/3 Operating Manual 1.4.3 Process Recipe Storage1.4.3.1 Film ParametersPre/Post DepositPower Ramps. . . . . . . . . . . . . .

1 - 8PN 074-446-P1JXTC/3 Operating ManualCrystal Stability, Total . . . . . . . . . . . . 0, 25 to 9999 Hz (1 to 24 are excluded)Crystal Quality Perce

1 - 9PN 074-446-P1JXTC/3 Operating Manual Power Display Range. . . . . . . . . . . . 0.0 to 99.9%Graphic Display Functions . . . . . . . . Rate Deviat

1 - 10PN 074-446-P1JXTC/3 Operating Manual# of TTL Compatible Outputs . . . . . . 8 standard. Internally pulled up to 5 V (dc). May be pulled up exter

1 - 11PN 074-446-P1JXTC/3 Operating Manual 1.4.10 Operating EnvironmentUsage . . . . . . . . . . . . . . . . . . . . . . . . Indoor onlyTemperature .

1 - 12PN 074-446-P1JXTC/3 Operating Manual1.5 Unpacking and Inspection1 If XTC/3 control module has not been removed from its shipping container, do

1 - 13PN 074-446-P1JXTC/3 Operating Manual 1.6.2 AccessoriesEach sensor requires an oscillator kit to interface to the controller:XTC/3 4.6 m (15 ft.

OPERATING MANUALXTC/3Thin Film Deposition ControllerPN 074-446-P1JTitle Pagewww.inficon.com [email protected]©2014 INFICON®

1 - 14PN 074-446-P1JXTC/3 Operating ManualAll shuttered sensors and all multi-position sensors require a feedthrough with an air line and a solenoid v

1 - 15PN 074-446-P1JXTC/3 Operating Manual For more information about Inficon’s full line of QCM sensors, please contact your local Inficon representa

1 - 16PN 074-446-P1JXTC/3 Operating Manual1.7 Initial Power On VerificationA preliminary functional check of XTC/3 can be made before formal installa

1 - 17PN 074-446-P1JXTC/3 Operating Manual 3 The LCD will display a screen similar to the one shown in Figure 1-1 or Figure 1-2.Figure 1-1 XTC/3M op

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2 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 2Installation and Interfaces2.1 Location GuidelinesBefore permanently installing XTC/3, read this e

2 - 2PN 074-446-P1JXTC/3 Operating Manual2.1.2 Sensor InstallationFigure 2-1 shows a typical installation of an INFICON water cooled crystal sensor i

2 - 3PN 074-446-P1JXTC/3 Operating Manual Install the sensor as far as possible from the evaporation source (a minimum of 10 in. [254 mm] is recommend

2 - 4PN 074-446-P1JXTC/3 Operating Manual2.1.3 XTC/3 InstallationXTC/3 is designed to be rack mounted with the optional rack mount kit (PN 780-702-G1

2 - 5PN 074-446-P1JXTC/3 Operating Manual 2.2.2 Connections to Earth GroundThere are two earth connections, both must be present: The ground connect

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.Windows®, Windows 95® and Microsoft® are

2 - 6PN 074-446-P1JXTC/3 Operating ManualIn many cases, a braided ground strap is sufficient. However, there are cases when a solid copper strap (0.03

2 - 7PN 074-446-P1JXTC/3 Operating Manual 2.3 Connecting the ControllerThe operation of the XTC/3 depends on the proper connection of power and signa

2 - 8PN 074-446-P1JXTC/3 Operating Manual2.3.3.2 Input and Output ConnectionsCAUTIONThe relay, relay circuit, and associated pins in the I/O connecto

2 - 9PN 074-446-P1JXTC/3 Operating Manual 2.3.3.2.1 System I/O ConnectorTable 2-1 System I/O connectorDescription Pin # XTC/3S FunctionRelay 1 1, 2

2 - 10PN 074-446-P1JXTC/3 Operating Manual2.3.3.2.2 Aux I/O Connector2.3.3.2.3 InputsInputs are activated by pulling the specific input's termi

2 - 11PN 074-446-P1JXTC/3 Operating Manual 2.3.4 RS-232C CommunicationsRS-232C serial communications is standard in XTC/3. RS-232C is used to remotel

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3 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 3Operation3.1 Front Panel ControlsFigure 3-1 XTC/3M front panel1 System SwitchesSTART, STOP and RE

3 - 2PN 074-446-P1JXTC/3 Operating Manual5 PowerThis switch controls secondary power to XTC/3 between ON and STANDBY. Power is provided when the butto

3 - 3PN 074-446-P1JXTC/3 Operating Manual 5 RS-232C Remote Communication Connector Provides a 9-pin RS-232C communications port.6 Ground StudSee secti

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Pla

3 - 4PN 074-446-P1JXTC/3 Operating Manual3.3 Displays Seven XTC/3 display screens are used for monitoring and programming processes: Operate Film P

3 - 5PN 074-446-P1JXTC/3 Operating Manual 3.3.1 Menu DisplayPressing MENU while on any other screen will display to the Menu screen. The Menu screen

3 - 6PN 074-446-P1JXTC/3 Operating ManualA graphical representation of rate deviation or the power over time will also be displayed. The graph display

3 - 7PN 074-446-P1JXTC/3 Operating Manual Operate Display Description (refer to Figure 3-4)1. Layer Currently In Process (Film in XTC/3S)2. Layer Time

3 - 8PN 074-446-P1JXTC/3 Operating Manual3.3.2.1 Crystal Life and Starting FrequencyOn the Operate display, crystal life is shown as a percentage of

3 - 9PN 074-446-P1JXTC/3 Operating Manual 3.3.3 Film Name DisplayFigure 3-6 Film Name displayThe Film Name display shows the film parameters and the

3 - 10PN 074-446-P1JXTC/3 Operating Manual3.3.4 Process List Display (XTC/3M only)The Process screen is present only in XTC/3M. XTC/3S is a single pr

3 - 11PN 074-446-P1JXTC/3 Operating Manual 3.3.5 General Parameter DisplayFigure 3-8 XTC/3M General Parameter display NOTE: XTC/3S replaces Process

3 - 12PN 074-446-P1JXTC/3 Operating Manual3.3.6 I/O Map DisplayFigure 3-9 XTC/3M I/O Map displayThe I/O Map screen displays the currently selected p

3 - 13PN 074-446-P1JXTC/3 Operating Manual 3.3.8 Sensor Information DisplayFigure 3-11 Typical Sensor Information displayInactive choices will be gr

3 - 14PN 074-446-P1JXTC/3 Operating Manual3.4 Executing a ProcessOnce a process has been defined as described in Chapter 4, it is ready to execute. 

3 - 15PN 074-446-P1JXTC/3 Operating Manual Figure 3-13 XTC/3 state diagramSTOPSTOPNONONOONYESYESYESON/STBYSTBY/PowerFAILSTANDBYRESETYESNONO SAVECURR

3 - 16PN 074-446-P1JXTC/3 Operating Manual1 Make sure XTC/3 is in READY or IDLE. 2 Press START. The next layer to be run will enter pre-deposition, an

3 - 17PN 074-446-P1JXTC/3 Operating Manual 3.5 State DescriptionsTable 3-1 State descriptionsSTATE CONDITION RELAY CONTACT STATUSSource ShutterSenso

3 - 18PN 074-446-P1JXTC/3 Operating ManualNOTE: The following are Deposit states.CONTROL DELAY(Deposit state)Constant Power at Soak Power 2. Begins ra

3 - 19PN 074-446-P1JXTC/3 Operating Manual Table 3-2 Output statesOutput Active InactiveSource Shut 1 In any deposit state When leaving control state

3 - 20PN 074-446-P1JXTC/3 Operating ManualReady (M only)When each State starts, the old and new state output are set or cleared as necessaryWhen each

3 - 21PN 074-446-P1JXTC/3 Operating Manual Shutter Delay Fail(M only)Shutter delay is enabled and the rate deviation is greater than 5% or 0.5 Å of th

3 - 22PN 074-446-P1JXTC/3 Operating ManualCruc 2 Valid (M only)Application of a ground reference voltage from the crucible rotation mechanism is used

3 - 23PN 074-446-P1JXTC/3 Operating Manual 3.5.1 Alarms and Stops There are a number of unusual XTC/3 situations that may require operator attention.

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

3 - 24PN 074-446-P1JXTC/3 Operating Manual A CRYSTAL FAIL detected during the DEPOSIT state if the Time Power parameter (Option sub-screen of the Fil

3 - 25PN 074-446-P1JXTC/3 Operating Manual 3.6.2 Ion Assisted DepositionThis feature will activate the designated output if the film currently runnin

3 - 26PN 074-446-P1JXTC/3 Operating Manualaccessible. If rate control is not achieved (see page 4-14) the Delay Failure Alarm message appears. If Stop

3 - 27PN 074-446-P1JXTC/3 Operating Manual A crystal (sensor in the case of Dual Head) switch will automatically occur when: XTC/3 is configured for

3 - 28PN 074-446-P1JXTC/3 Operating ManualThe Crystal Fail state can be cleared by pressing TOGL in the Sensors screen with the cursor on Clear Failed

3 - 29PN 074-446-P1JXTC/3 Operating Manual During deposition, XTC/3 will automatically switch to the next position with a good crystal when there is a

3 - 30PN 074-446-P1JXTC/3 Operating Manual3.6.8.6 XTC/3S Sensor Shutter / CrystalSwitch OutputDue to limitations imposed by the fixed I/O functions i

3 - 31PN 074-446-P1JXTC/3 Operating Manual 3.6.10 RateWatcher It is easy to automatically sample the deposition rate periodically and then maintain t

3 - 32PN 074-446-P1JXTC/3 Operating ManualWhen XTC/3 is placed in the Manual Power mode by pressing the MPWR key, power is affected by moving the POWE

3 - 33PN 074-446-P1JXTC/3 Operating Manual 6 Average Power = xx.x % 7 S Value = 0 to 99998 Q Value = 0 to 999 Begin Frequency = xxxxxxxx.x Hz10 End Fr

3 - 34PN 074-446-P1JXTC/3 Operating ManualThis page is intentionally blank.zp

4 - 1PN 074-446-P1JXTC/3 Operating Manual Chapter 4XTC/3 Programming4.1 OverviewThe following basic procedure is used to program XTC/3. If a lock cod

4 - 2PN 074-446-P1JXTC/3 Operating Manual4 Configure General ParametersFrom the General Parameter display, three sub-screens can be accessed: Process;

4 - 3PN 074-446-P1JXTC/3 Operating Manual 4.2 Film Set Up Overview 4.2.1 Film Set UpThe film screen appears after pressing the MENU key, then cursor

4 - 4PN 074-446-P1JXTC/3 Operating Manual4.2.2 Film Definition A film is defined by the parameters needed to run it, including sensor and source numb

4 - 5PN 074-446-P1JXTC/3 Operating Manual 4.2.3 Film Definition ParametersThe Film parameters are entered in the Pre/Post, Deposit, Sensor, Source an

4 - 6PN 074-446-P1JXTC/3 Operating ManualIdle Ramp The next two parameters define an idle ramp provided to maintain the control voltage power level af

4 - 7PN 074-446-P1JXTC/3 Operating Manual 4.2.3.2 Deposit Figure 4-3 Deposit Film Programming screenFILM NUMBER . . . . . . . . . . . . . . . . 1 t

4 - 8PN 074-446-P1JXTC/3 Operating ManualRW ACCURACY . . . . . . . . . . . . . . . 1 to 99%During the rate sampling period, the deposition rate is mea

4 - 9PN 074-446-P1JXTC/3 Operating Manual Tooling is a correction factor used for correlating the rate and thickness accumulation on the crystal with

TOC - 1PN 074-446-P1JXTC/3 Operating Manual Table Of ContentsCover PageTitle PageTrademarksDisclaimerCopyrightDeclaration Of ConformityWarrantyChapt

4 - 10PN 074-446-P1JXTC/3 Operating Manualand/or the shutter closes, the crystal frequency will decrease due to cooling. Because small increases in fr

4 - 11PN 074-446-P1JXTC/3 Operating Manual 4.2.3.4 Source ParametersFigure 4-5 Source Film Programming screenSOURCE . . . . . . . . . . . . 1, 2Thi

4 - 12PN 074-446-P1JXTC/3 Operating ManualCONTROL GAIN . . . . . . 0.01 to 100.0 Å/sec/% PwrThis parameter determines the change in % Power for a give

4 - 13PN 074-446-P1JXTC/3 Operating Manual DEAD TIME . . . . . . . . . . 0.1 to 100.0 secThis value is defined as the time difference between a change

4 - 14PN 074-446-P1JXTC/3 Operating Manual4.2.3.5 OptionFigure 4-9 XTC/3M Option Film Programming screenTIME POWER . . . . . . . . Yes / No using

4 - 15PN 074-446-P1JXTC/3 Operating Manual to a well controlled rate of evaporant flux. If the required rate control accuracy cannot be achieved withi

4 - 16PN 074-446-P1JXTC/3 Operating Manual4.3 Process Set-Up Overview (XTC/3M only)Figure 4-10 Main Menu screen In XTC/3M, the Process display appea

4 - 17PN 074-446-P1JXTC/3 Operating Manual 4.3.1 Process DefinitionFigure 4-11 Process screen4.3.1.1 Process NumberPROCESS . . . . . . . . . . . 1

4 - 18PN 074-446-P1JXTC/3 Operating ManualEntering a film number between 1 and 32 next to a layer number, followed by the ENTER key, will place the de

4 - 19PN 074-446-P1JXTC/3 Operating Manual 4.4.1 Process ParametersFigure 4-13 XTC/3M Process screenFigure 4-14 XTC/3S Process screenPROCESS TO RUN