Inficon Guardian EIES Controller Manuel d'utilisateur

OPERATING MANUALGuardian™Co-Deposition ControllerIPN 074-517-P1D

TOC - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual2.4 Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4 - 8 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.3.2 Single-Detector SystemsFor single-material thin film systems, only one

4 - 9IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manualsignal losses can be significant, which may result in a signal that has a low

4 - 10 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3 Now attach each leg of the fiber optic bundle to an EIES detector. See Fig

4 - 11IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualCAUTIONBe careful when bending fiber optic lines. Individual internal fibers

4 - 12 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manualadjustments to compensate for these differences; however, that does not adeq

4 - 13IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.5 Computer ConnectionsGuardian requires a connection to an external comput

4 - 14 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualTo access the Network Connection on the PC, select Network Connections from

4 - 15IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualOn the General tab, select Internet Protocol (TCP/IP) and press the Propertie

4 - 16 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 4-15 Entering the IP Address and Subnet maskClick OK to all open dia

4 - 17IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.6 Controller InstallationMount the controller in a location that allows ea

TOC - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.6.1 Layer Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4 - 18 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.6.2 Relay Connector PinoutThe relays are Form1A (SPST, normally open) mec

4 - 19IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.6.3 Input Connector PinoutTie Common (pin 10) to a supply voltage (+12 V i

4 - 20 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.6.4 Sensor(s)Connect the sensor filament cable (IPN 600-1407-P10 [10 ft.

4 - 21IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.6.5 Control OutputsConnect a BNC cable (not supplied) from the EIES Contro

4 - 22 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.6.7 Mains PowerWith the power switch OFF, connect the AC mains to the con

4 - 23IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.7 Quartz Crystal Monitor Option (QCM)A Quartz Crystal Monitor (QCM) is com

4 - 24 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.8 Monochromator Option The 782-900-070 Monochromator Kit, see Figure 4-18

4 - 25IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualFigure 4-18 Monochromator Kit

4 - 26 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.8.2 Monochromator OperationOnce the monochromator is installed, you can s

5 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 5Maintenance & TroubleshootingWARNINGThere are no adjustments or u

TOC - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualChapter 4Installation4.1 Introduction. . . . . . . . . . . . . . . . . . .

5 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual5.3 Sensor MaintenanceThe only maintenance required for the sensor is period

5 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual5.3.2 EIES Filament or Emitter Assembly ReplacementNOTE: The emitter assembly

5 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 5-2 New 016-Series Sensor Exploded1 Unplug the in-vacuum cable from t

5 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual7 Replace the Sensor cover.8 Check the resistance between the emitter’s connec

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6 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 6Theory & Calibration6.1 IntroductionThis chapter contains inform

6 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualWithin the sensor housing, electrons from the filament strike the evaporant a

6 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual6.2.2 Optical DiscriminationFigure 6-2 Spectra for Aluminum, Copper, and a c

6 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualHowever, for Cu the line near 3250 Å is not only attenuated, but is also near

6 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual6.3 Theory of QCM MeasurementsAs material is deposited on a quartz crystal, i

TOC - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 5Maintenance & Troubleshooting5.1 How To Contact Customer Suppor

6 - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualZ-Ratio can be calculated using the Shear Modulus of quartz (Uq) and the depo

6 - 7IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual6.3.3 Tooling FactorTooling Factor adjusts for the difference in material dep

6 - 8 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual6.4 EIES CalibrationEIES is an accurate means of measuring deposition rate a

6 - 9IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualOn the Edit Layer dialog box, adjust the PMT voltage until the % Current readi

6 - 10 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual6.4.5 Gain Calibration - QCMA Quartz Crystal Monitor (QCM) provides an accu

6 - 11IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual6.4.6 Cross Channel CalibrationThe EIES detector may detect optical emission

6 - 12 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualCreate a One-Layer Test Process: Create a new process that has a single film

6 - 13IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualContinue to Start the process and adjust PID until steady-state response is s

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7 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 7Communications7.1 IntroductionThe computer interface capabilities of

TOC - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7.3 Guardian Controller Direct Communications . . . . . . . . . . . . . . .

7 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7.2.3 EIES ActiveX Comm Program ProtocolEIES program commands fall into two

7 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualExample Response: Set Process Update Failed@UP;<NAK>;<ERR>;??<C

7 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual05 Stop Layer06 Reset07 Set Run #08 Next Layer09 Set Active Layer #34 DataLog

7 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual03 D Term05 Shutter Timeout06 Shutter Accuracy10 Calibration Accuracy11 Calibr

7 - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualQuery Sensor@QS;<param1>where <param1> is:01 Sensor 1 Status (0=O

7 - 7IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualQuery/Update Utility@QU;<param1>@UU;<param1>;<Param1>02 Simu

7 - 8 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7.3 Guardian Controller Direct CommunicationsIf you prefer to control the Gu

7 - 9IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual7.3.3.1 V3.XX Controller Command/Response FormatThe V3.XX controller command

7 - 10 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualThe CRC is computed using the following algorithm:· The CRC is initialized t

7 - 11IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual private static byte crcHigh(short crc) { byte val = (byte) (((crc >

1 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 1Introduction and Specifications1.1 IntroductionThe EIES-IV Guardian

7 - 12 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7.3.4 Command Summary for V3.XX and V4.XX Guardian Controller NOTE: # is ch

7 - 13IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual7.3.4.4 CDescription: Sets the bias current into the PMT module A to D conve

7 - 14 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7.3.4.7 GDescription: Get PMT readings. Readings are returned as a comma d

7 - 15IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual7.3.4.9 KDescription: Sets the output voltage of control outputs 1 to 6 to a

7 - 16 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7.3.4.13 TDescription: Reads voltage on one of the eight controller outputs

A - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualAppendix AMaterial Optical ParametersNOTE: Items in parenthesis indicate addit

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B - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualAppendix BMaterial QCM ParametersMaterial Density Z-Ratio Material Density Z-R

B - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualThis page is intentionally blank.

Index - 1IPN 074-517-P1CGuardian Co-Deposition Controller Operating ManualIndexAActiveX 3-1, 7-1add layer 3-15Bbackground noise 2-19CCal Zero 6-9Cal

1 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual1.2 EIES ControllerThe EIES-IV Guardian Controller serves as the interface b

Index - 2 IPN 074-517-P1C Guardian Co-Deposition Controller Operating ManualQQCM Calibration 2-27Query command 7-2RRatio 2-6, 3-8, 3-20, 3-21Relay 2-

1 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualFigure 1-4 EIES Single Sensor and Feedthrough 016-600-GxxThe sensor assembly

1 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 1-5 Gas Compensating Sensor and Feedthrough 016-601-Gxx

1 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual1.4 EIES DetectorThe EIES detector module's photomultiplier tube (PMT) m

1 - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 1-7 EIES Software1.6 Quartz Crystal MonitorIn the EIES system, rate

1 - 7IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual1.8 Specifications1.8.1 SensorType . . . . . . . . . . . . . . . . . . . . .

1 - 8 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual1.8.2 DetectorPhotomultiplier Tube (PMT) . . . . . . . Hamamatsu R7518 or eq

1 - 9IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualOperating Environment . . . . . . . . . . 0°C to 40°C0 to 80% RH non-condensi

1 - 10 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualThis page is intentionally blank.

2 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 2Quick Start2.1 IntroductionThis section covers the minimum system co

2 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualTo install the sensor, loosen the collar that secures the telescoping tube an

2 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual2.2.2 Detector—Direct InstallationFor single detector applications, the detec

2 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual2.2.4 Controller InstallationMount the controller in a location that allows

2 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualWARNINGMaintain adequate insulation and physical separation of sensor, detecto

OPERATING MANUALGuardian™Co-Deposition ControllerIPN 074-517-P1Dwww.inficon.com [email protected]©2012 INFICON®

2 - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual2.3.2 EIES Main ScreenClick the EIES-IV icon on your desktop (or click Start

2 - 7IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualFigure 2-4 Readings DisplayNotice that, unlike the previous display, there ar

2 - 8 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual2.3.3 Edit FilmEach material deposited will require unique setup parameters

2 - 9IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualLayers are numbered sequentially starting at layer 1. After the layer number i

2 - 10 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 2-7 CoDep OptionA co-deposition film has been added to the first lay

2 - 11IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual2.3.5 Edit LayerHighlight Layer 1: Ch:1 Out:1 Cu and click Edit to display t

2 - 12 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualClick the X Chan tab to view the settings used to eliminate cross channel in

2 - 13IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualThe Film and Film Cal(ibration) tabs are for the selected film, Se. On the Fi

2 - 14 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualNow select the Film Cal(ibration) tab and verify Channel Input and Cal. QCM#

2 - 15IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualWhen you are ready, return to the Edit Process dialog box shown in Figure 2-1

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.ConFlat® is a registered trademark of Va

2 - 16 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 2-14 2-Layer CIGS ProcessClick OK to return to the main screen with

2 - 17IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualClick Setup on the graph menu to show the Graph Setup dialog box.Figure 2-16

2 - 18 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual2.4 Initial SetupConnect the Guardian controller rear panel RS-232 connecto

2 - 19IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual2.4.3 Detector CalibrationThe internal electronics of each EIES detector mod

2 - 20 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual2.4.4 Sensor SetupThe Guardian controller can operate up to two standard or

2 - 21IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualGuardian controllers with Gas Compensating sensors have additional Emission a

2 - 22 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualIf the SQM-242 card is installed properly, Card: 2.XX, DLL: OK is displayed.

2 - 23IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual2.5.2 Setup Layer ParametersDisplay the Edit Layer dialog box for the channe

2 - 24 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 2-24 Film Tab Full Scale VoltageSelect the Film Cal(ibration) tab, a

2 - 25IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual2.5.3 Start DepositionNOTE: Pump down the vacuum chamber to below 1E-5 Torr

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place E

2 - 26 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 2-27 Channel Edit ButtonThe Edit Layer dialog box is displayed. On t

2 - 27IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual2.5.4 Manual CalibrationCalibrate the main screen rate reading to match the

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3 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 3EIES Software3.1 IntroductionThe EIES-IV Guardian Windows program is

3 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 3-1 3 Phases of Deposition CycleDuring pre-conditioning, the source m

3 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.2 InstallationNOTE: The EIES program may be installed and used in Simulate

3 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 3-3 EIES Program Main ScreenThe EIES main screen displays the last us

3 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.3 Main ScreenThe EIES main screen, see Figure 3-5, consists of three panels

3 - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualLayer Time: The accumulated time for this layer. Resets to 0 if the layer is

3 - 7IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.3.3 Readings Panel—Process ModeThe readings panel, see Figure 3-8, has two

CE Implementation Date: May 2008 (Updated May 2010) Authorized Representative: Steve Schill Thin Film Business Manager INFICON Inc

3 - 8 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualManual (Power): Switches the output power between PID loop control and manual

3 - 9IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.3.5 Readings Panel—Readings ModeClick View >> Readings to see the rea

3 - 10 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFlux (nA): The flux plus gas signal, minus the background light.Flux %: The

3 - 11IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualThick(ness): The deposited thickness measured by each QCM sensor.Zero: Click

3 - 12 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualSave Database As: Saves the current process database to disk under a differe

3 - 13IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualLog Interval: The elapsed time between data log entries. The data log is upda

3 - 14 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.4.6 File >> Page SetupProvides printer selection and page orientati

3 - 15IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualNOTE: The Edit Process dialog box can only be accessed when the process is st

3 - 16 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.6 Edit LayerA Layer establishes the desired rate and thickness (plus a fe

3 - 17IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.6.1 Layer GridParameters on the Layer tab are unique to this layer. Those

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

3 - 18 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualStart Mode: A layer may start in three ways. In Auto, the layer starts immed

3 - 19IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.6.3 X Chan (Cross Channel) TabParameters on the X Chan tab are unique to t

3 - 20 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualCurrent: A percent of each xChan Detector current is subtracted, before any

3 - 21IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualRatio Filter: The number of readings averaged for the ratio display. 0 disabl

3 - 22 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.6.5.1 Deposit GridP Term: Sets the gain of the control loop. High gains y

3 - 23IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.6.5.2 Condition GridRamp1 Power: The power level desired at the end of the

3 - 24 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.6.6 Edit Layer Film Cal NOTE: The parameters on the Film Cal. tab are Fil

3 - 25IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualCal Gain: The multiplier used to convert EIES current measurements to calibra

3 - 26 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.6.6.2 QCM GridCal QCM#: Establishes which QCM sensor is used to calibrate

3 - 27IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.7 Edit: FilmA Film sets the parameters for the material to be deposited in

3 - 28 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.7.1 Deposit GridRefer to section 3.6.5.1.3.7.2 Condition GridRefer to se

3 - 29IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.8 Edit >> SystemThe Edit System dialog box contains parameters that

3 - 30 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.8.2 Sensor TabThe format of the Sensor tab is determined by the type of s

3 - 31IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualGas Cal: INFICON's gas compensating sensors provide a measurement of the

3 - 32 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualQ-pod: INFICON's Q-pod transducers are used for QCM measurements. The s

3 - 33IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.8.4 Digital I/O TabFigure 3-26 Edit System I/O Tab3.8.4.1 Relay AssignTo

3 - 34 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualTime Setpoint Relay: This relay will close when Run Time equals the Time Set

3 - 35IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.8.5 Comm TabThe Comm Tab sets up communications between the EIES program a

3 - 36 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualShow Comm: Displays a diagnostic screen that shows communications between th

3 - 37IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.8.6 Display TabFigure 3-29 Edit System Display TabShow 1 to : Sets the ma

TOC - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualTable Of ContentsTrademarksDisclaimerCopyrightChapter 1Introduction and Spec

3 - 38 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.9 View Menu3.9.1 Process, Ratio, ReadingsThe Process, Ratio and Readings

3 - 39IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual3.9.2.1 Graph SetupThe Graph Setup dialog box provides access to the most co

3 - 40 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual3.9.2.1.2 Y Axis Left/RightCaption: The caption shown along the graph'

4 - 1IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualChapter 4Installation4.1 IntroductionChapter 2 provided a "quick start&q

4 - 2 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual4.2 Sensor / Feedthrough AssemblyThe sensor will not pass through the 2.75

4 - 3IPN 074-517-P1DGuardian Co-Deposition Controller Operating ManualFigure 4-2 EIES Gas Compensating Sensor 016-601-Gxx4.2.1 Sensor PositionLoca

4 - 4 IPN 074-517-P1D Guardian Co-Deposition Controller Operating ManualFigure 4-3 EIES Sensor CutoutsFigure 4-4 Sensor Placement4.2.2 Sensor Cove

4 - 5IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.2.3 Rigid Sensor InstallationFigure 4-5 Rigid Sensor Installation1 Loosen

4 - 6 IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual7 Wrap aluminum foil (may not be suitable for use with Se) or other shielding

4 - 7IPN 074-517-P1DGuardian Co-Deposition Controller Operating Manual4.3 DetectorYour specific system configuration and space constraints will det