Inficon SQM-160 Thin Film Deposition Monitor manuels

Manuels d'utilisation et guides de l'utilisateur pour Équipement Inficon SQM-160 Thin Film Deposition Monitor.
Nous fournissons des manuels en pdf 1 Inficon SQM-160 Thin Film Deposition Monitor à télécharger gratuitement par type de document : Manuel d'utilisateur


Table des matières

OPERATING MANUAL

1

Trademarks

4

Disclaimer

4

Copyright

4

Warranty

7

Table Of Contents

9

SQM-160 Operating Manual

10

Chapter 6

11

Chapter 1

13

Introduction

13

1.1.1 Related Manuals

14

1.2.3 Earth Ground

15

1.3 How To Contact INFICON

16

1.3.1 Returning Your SQM-160

17

1.4.1 Measurement

17

1.4.2 Film Parameters

17

1.4.3 System Parameters

18

1.4.4 Digital I/O

18

1.4.5 General Specifications

19

1.6.1 Base Configurations

20

1.6.2 Accessories

21

1.6.3 Sensors

21

1 - 10

22

Chapter 2

23

Quick Start

23

2.3 Front Panel

24

2.4 Rear Panel

25

2.5 System Connections

26

2.6 Film Setup

28

2.7 Depositing a Film

29

Chapter 3

31

Operation

31

3.3 Film Menu

32

Table 3-1 Film Menu

33

3.4 System Menu

34

3.5 Sensor Selection

36

3.6 Sensor Frequency

37

Substrate

38

3.8 Display Units

39

3.9 Crystal Life

39

3.10 Zero Thickness

39

3.11 Shutter Operation

40

3.12 Dual Sensors

40

3.13 Rate Sampling

41

3.14 Time Setpoint

42

3.15 Thickness Setpoint

43

3.16 Simulate Mode

44

3.17 Defaulting the Memory

44

3.18 Relay Operation

45

3.20 I/O Connections

46

3 - 17

47

3.21 Rack Mounting Procedure

48

Chapter 4

49

SQM-160 Comm Software

49

4.3 Main Window

50

4.4 Data Log Menu

52

4.5 Films Menu

54

4.6 System Menu

56

4.7 Communications Menu

57

4.8 Graph Options

58

4.9 Help Menu

59

4 - 12

60

5.1.1 RS-232C Serial Port

61

5.1.2 USB Port

61

5.1.3 TCP/IP Ethernet Port

62

Properties. See Figure 5-2

63

5.2 SQM-160 Comm Software

65

5.4.1 Command: @

67

5.4.2 Command: A

67

5.4.3 Command: B

68

5.4.4 Command: C

68

5.4.11 Command: P

70

5.4.12 Command: R

70

5.4.13 Command: S

70

5.4.14 Command: T

70

5.4.15 Command: U

70

5.4.16 Command: W

71

5.4.17 Command: Y

71

5.4.18 Command: Z

71

5.5.1 Visual Basic

72

5.5.2 Java

74

5.5.3 C++

74

5 - 15

75

5 - 16

76

6.2 Troubleshooting

78

6.3 Replacing the Crystal

84

6.3.1 Front Load

85

6.3.2 Cool Drawer

86

6.3.3 Bakeable Sensor

88

6.3.4 Sputtering Sensor

89

6.3.5 Crystal Snatcher

90

6.4 Crystal Sensor Emulator

91

IPN 760-601-G2

91

6.4.1 Diagnostic Procedures

92

6 - 17

93

6 - 19

95

6 - 20

96

6 - 21

97

6 - 22

98

Chapter 7

99

Calibration Procedures

99

7.3 Determining Tooling

100

IPN 074-511-P1C

101

Chapter 8

103

Measurement and Theory

103

8.1.1 Monitor Crystals

104

Frequency (in MHz)

105

8.1.3 Z-match Technique

107

8.1.4 Active Oscillator

108

SQM-160 Operating Manual

109

Appendix A

111

Material Table

111

A - 10

120





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